Out-of-Plane Strain Effects on Physically Flexible FinFET CMOS

Ghoneim, Mohamed T.; Alfaraj, Nasir; Torres-Sevilla, Galo A.; Fahad, Hossain M.; Hussain, Muhammad Mustafa

doi:10.1109/ted.2016.2561239

Cited by 14 publications

(7 citation statements)

References 20 publications

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“…The columns represent average values from five readings, and the error bars typically represent the standard deviation. The sensor has sensitivity of −60.3 mV/pH, drift of 0.64 mV/h in pH 5, drift of 0.49 mV/h in pH 7, and a response time of 1 s. The flexible PANI pH sensor sustained performance over 1000 mechanical bending cycles, making it suitable for integration with other high performance flexible electronic components that have been demonstrated to survive such bending behavior for mechanically dynamic applications. − Nguyen et al showed three measurement runs overlaid as another route for displaying pH sensor’s repeatability, indicating acceptable repeatability from an IrOx-based pH sensor in OCP configuration vs Ag/AgCl RE with sensitivity of ∼−60 mV/pH and response time of 30 s …”

Section: Challengesmentioning

confidence: 99%

Recent Progress in Electrochemical pH-Sensing Materials and Configurations for Biomedical Applications

et al. 2019

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pH-sensing materials and configurations are rapidly evolving toward exciting new applications, especially those in biomedical applications. In this review, we highlight rapid progress in electrochemical pH sensors over the past decade (2008–2018) with an emphasis on key considerations, such as materials selection, system configurations, and testing protocols. In addition to recent progress in optical pH sensors, our main focus in this review is on electromechanical pH sensors due to their significant advances, especially in biomedical applications. We summarize developments of electrochemical pH sensors that by virtue of their optimized material chemistries (from metal oxides to polymers) and geometrical features (from thin films to quantum dots) enable their adoption in biomedical applications. We further present an overview of necessary sensing standards and protocols. Standards ensure the establishment of consistent protocols, facilitating collective understanding of results and building on the current state. Furthermore, they enable objective benchmarking of various pH-sensing reports, materials, and systems, which is critical for the overall progression and development of the field. Additionally, we list critical issues in recent literary reporting and suggest various methods for objective benchmarking. pH regulation in the human body and state-of-the-art pH sensors (from ex vivo to in vivo) are compared for suitability in biomedical applications. We conclude our review by (i) identifying challenges that need to be overcome in electrochemical pH sensing and (ii) providing an outlook on future research along with insights, in which the integration of various pH sensors with advanced electronics can provide a new platform for the development of novel technologies for disease diagnostics and prevention.

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Section: Challengesmentioning

confidence: 99%

Recent Progress in Electrochemical pH-Sensing Materials and Configurations for Biomedical Applications

et al. 2019

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“…For instance, in the presence of high humidity, the SiO x chemical gate will form an n-channel and the SiO x CSFET will begin conducting current. Such a silicon technology can be transformed into a flexible form by utilizing a back-flexing method based on deep reactive ion etching (DRIE) [94][95][96] or releasing the top functional layer with xenon difluoride (XeF 2 ) vapor phase etching. [97,98] In addition to ground robots, legged robots can be useful in remote underwater surveying due to their ability to traverse complex and unstructured terrain.…”

Section: Sensorsmentioning

confidence: 99%

Accessorizing Quadrupedal Robots with Wearable Electronics

Kim,

Belkadi,

Mayer

et al. 2024

Advanced Intelligent Systems

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Robots epitomize one of the most popular human imaginations that are evolving to become reality in the most pervasive way. Especially with the rise of artificial intelligence, it is more hopeful than ever that robots one day will be the interactive companions with some degree of emotion. A variety of robots in different forms with considerable mobility are available today. Among them, legged robots are the most attractive due to their dexterity, traversal versatility, functional modularity, and locomotive stability. Legged robots like robotic dogs can survey unchartered territories in uncertain environments. In this comprehensive review article, the status quo of this emerging and exciting field and how electronics of various form factors can functionalize them in an unbiased manner are surveyed and discussed. Different accessories currently available for quadrupedal robots, wearable devices potentially integratable with these robots, data management/integration strategies for reliable interfacing, and future outlook are discussed.

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“…The surfaces of the molds were grinded and polished to minimize the contact resistance between the plastic substrate and the bending apparatus. The top surface strain (ε), mainly defined by the thickness of the substrate, was calculated as follows [23]. 4 (right).…”

Section: Comparison Of Measured C-v Curves At Different Bending Strainsmentioning

confidence: 99%

Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors

Wang,

Lu,

Zhang

et al. 2023

Micromachines

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Ultrathin flexible encapsulation (UFE) using multilayered films has prospects for practical applications, such as implantable and wearable electronics. However, existing investigations of the effect of mechanical bending strains on electrical properties after the encapsulation procedure provide insufficient information for improving the electrical stability of ultrathin silicon nanomembrane (Si NM)-based metal oxide semiconductor capacitors (MOSCAPs). Here, we used atomic layer deposition and molecular layer deposition to generate 3.5 dyads of alternating 11 nm Al2O3 and 3.5 nm aluminum alkoxide (alucone) nanolaminates on flexible Si NM-based MOSCAPs. Moreover, we bent the MOSCAPs inwardly to radii of 85 and 110.5 mm and outwardly to radii of 77.5 and 38.5 mm. Subsequently, we tested the unbent and bent MOSCAPs to determine the effect of strain on various electrical parameters, namely the maximum capacitance, minimum capacitance, gate leakage current density, hysteresis voltage, effective oxide charge, oxide trapped charge, interface trap density, and frequency dispersion. The comparison of encapsulated and unencapsulated MOSCAPs on these critical parameters at bending strains indicated that Al2O3/alucone nanolaminates stabilized the electrical and interfacial characteristics of the Si NM-based MOSCAPs. These results highlight that ultrathin Al2O3/alucone nanolaminates are promising encapsulation materials for prolonging the operational lifetimes of flexible Si NM-based metal oxide semiconductor field-effect transistors.

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Out-of-Plane Strain Effects on Physically Flexible FinFET CMOS

Cited by 14 publications

References 20 publications

Recent Progress in Electrochemical pH-Sensing Materials and Configurations for Biomedical Applications

Recent Progress in Electrochemical pH-Sensing Materials and Configurations for Biomedical Applications

Accessorizing Quadrupedal Robots with Wearable Electronics

Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors

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