Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

Jin, Lei; Gao, Shiqiao; Zhang, Xiyang; Wu, Qinghe

doi:10.3390/ma13102330

Cited by 10 publications

(6 citation statements)

References 20 publications

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“…In recent years, the main contradiction is that the vibration source requires the device to match a lower resonance frequency. In addition, material optimization, substrate replacement, and geometry change are the main methods currently utilized for the optimization of harvesters [ 38 , 39 ]. However, to date, there have been limited systematic studies on cantilever beam structure-based PEHs.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Piezoelectric Cantilever Beam Vibration Energy Harvester

Gao

et al. 2022

Micromachines

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Piezoelectric cantilever beams are commonly utilized to harvest energy from environmental vibrations due to their simple structures. This paper optimizes a single crystal trapezoidal hollow structure piezoelectric cantilever beam vibration energy harvester with a copper substrate to achieve high energy density at a low frequency. Finite element analysis (FEA) is adopted to optimize the size of the copper substrate at first, and the piezoelectric energy harvester (PEH) is further optimized with a trapezoidal hollow structure under the optimal size of the copper substrate. The developed PEH with a trapezoidal hollow structure (La = 20 mm, Lb = 15 mm, and Lh = 40 mm), with a copper substrate of 80 mm × 33 mm × 0.2 mm, can obtain the best output performance. Under the condition of 1 g acceleration, the resonance frequency and peak voltage output were 23.29 Hz and 40.4 V, respectively. Compared with the unhollowed PEH, the developed trapezoidal hollow structure PEH can reduce its resonant frequency by 12.18% and increase output voltage by 34.67%, while also supplying a power density of 7.24 mW/cm3. This study verified the feasibility of the optimized design through simulation and experimental comparison.

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Section: Introductionmentioning

confidence: 99%

Design and Optimization of Piezoelectric Cantilever Beam Vibration Energy Harvester

Gao

et al. 2022

Micromachines

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“…In addition, conventional silicon substrates are extremely vulnerable to damage due to their high modulus characteristics [22]. Therefore, material optimization, substrate replacement and geometry change are the main methods currently utilized for the optimization of harvesters [23][24][25][26][27]. Dong et al [23] proposed a dual-crystal PEH that was asymmetric from top to bottom and studied the effect of different coverage PZT lengths on device performance.…”

Section: Introductionmentioning

confidence: 99%

“…In terms of geometric optimization, Nisanth et al [26] studied the performance of PEHs under different mass shapes. Compared with the PEH array with the traditional rectangular mass, the PEH array with the triangular mass increased the power output by 1.79 times at 0.5 g. Jin et al [27] studied the influence of different width beam shapes and electrode arrangements on the voltage output of harvesters, and verified through simulation and experimentation that the parabolic shape beam resulted in the best improvement in the performance of the devices. Differently shaped PEHs make the preparation and bonding of the proof masses difficult; however, the extension of linear PEHs will expand the options for device integration.…”

Section: Introductionmentioning

confidence: 99%

Design, Manufacture and Test of Piezoelectric Cantilever-Beam Energy Harvesters with Hollow Structures

et al. 2021

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This article presents a single-crystal piezoelectric energy harvester (PEH) with a trapezoidal hollow hole that can obtain high energy density at low frequency. Harvesters with a hollow structure were fabricated through a series of manufacturing processes such as thermocompression bonding, screen printing and laser cutting. Finite element analysis (FEA) and experimental results showed that using low modulus brass instead of stainless steel as the PEH substrate enhances the voltage output of the device, and the hollow design greatly increases the overall stress level and power density. In addition, the developed PEH with a trapezoidal hole obtained the best output performance; when the acceleration, resonance frequency and matched load resistance were 0.5 g, 56.3 Hz and 114 kΩ, respectively, the peak voltage was 17 V and the power density was 2.52 mW/cm3. Meanwhile, compared with the unhollowed device, the peak voltage and maximum power density of the proposed PEH were increased by 30.7% and 24.4%, respectively, and the resonance frequency was reduced by 7%. This study verified the feasibility of the optimized design through simulation and experimental comparison.

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“…Wang simulated and experimentally analyzed the array rectangular piezoelectric cantilever [ 19 ] and verified that the array piezoelectric cantilever could effectively increase the working frequency band. L. Jin investigated the output performance of a MEMS piezoelectric energy harvester under different width shapes [ 20 ]. In the research, the output performance of the harvester was tested by setting different cantilever structures.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Performance of a Symmetrical Ring-Shaped Piezoelectric Energy Harvester Using PZT-5H under a Temperature Gradient

Zhou

et al. 2020

Micromachines

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With the rapid development of microelectronics technology, low-power electronic sensors have been widely applied in many fields, such as Internet of Things, aerospace, and so on. In this paper, a symmetrical ring-shaped piezoelectric energy harvester (SR-PEH) is designed to provide energy for the sensor to detect the ambient temperature. The finite element method is used by utilizing software COMSOL 5.4, and the electromechanical coupling model of the piezoelectric cantilever is established. The output performance equations are proposed; the microelectromechanical system (MEMS) integration process of the SR-PEH, circuit, and sensor is stated; and the changing trend of the output power density is explained from an energy perspective. In the logarithmic coordinate system, the results indicate that the output voltage and output power are approximately linear with the temperature when the resistance is constant. In addition, the growth rate of the output voltage and output power decreases with an increase of resistance under the condition of constant temperature. In addition, with an increase of temperature, the growth rate of the output power is faster than that of the output voltage. Furthermore, resistance has a more dramatic effect on the output voltage, whereas temperature has a more significant effect on the output power. More importantly, the comparison with the conventional cantilever-shaped piezoelectric energy harvester (CC-PEH) shows that the SR-PEH can improve the output performance and broaden the frequency band.

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Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

Cited by 10 publications

References 20 publications

Design and Optimization of Piezoelectric Cantilever Beam Vibration Energy Harvester

Design and Optimization of Piezoelectric Cantilever Beam Vibration Energy Harvester

Design, Manufacture and Test of Piezoelectric Cantilever-Beam Energy Harvesters with Hollow Structures

Piezoelectric Performance of a Symmetrical Ring-Shaped Piezoelectric Energy Harvester Using PZT-5H under a Temperature Gradient

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