Output pressure and pulse-echo characteristics of Capacitive Micromachined Ultrasonic Transducers as function of plate thickness

Diederichsen, Søren Elmin; Hansen, Jesper Mark Fly; Engholm, Mathias; Jensen, Jørgen Arendt; Thomsen, Erik Vilain

doi:10.1109/ultsym.2017.8092752

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“…CMUTs are composed of hundreds to thousands of resonance elements, commonly termed CMUT cells, that operate in parallel while increasing the signal-to-noise ratio (SNR). They present possibilities for gas sensing with the desired LOQ and LOD characteristics ,− and can be miniaturized and integrated into other sensing systems and electronics. It has recently been shown that CMUTs can reach a low detection limit toward DMMP with a LOD of 16.8 ppt − as well as to detect various liquids such as water, ethanol, acetone, ethyl acetate, immune complex, and CO 2 …”

Section: Introductionmentioning

confidence: 99%

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

Barauskas

Park

Pelenis

et al. 2019

ACS Appl. Electron. Mater.

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A capacitive micromachined ultrasonic transducer (CMUT)-based sensor modified with methylated poly(ethylenimine) (mPEI) was designed and tested for the detection of two acidic gases: carbon dioxide (CO2) and sulfur dioxide (SO2). Combined gas sensing and Fourier transform infrared spectroscopy of the adsorbed products allowed to simultaneously and in situ determine the types and strength of the molecular interactions responsible for sensing. For CO2, the limit of detection was calculated to be 0.011 CO2 vol % and the limit of quantification was calculated to be 0.033%. For SO2, the limit of detection was calculated as 0.232 SO2 vol % and the limit of quantification was 0.704%. The sensing system exhibited a linear response at lower concentrations for CO2 and linear response for all the tested concentrations of SO2. In situ IR and ex situ Raman showed that CO2 was observed to undergo weak molecular coordination with mPEI while SO2 bound strongly and irreversibly degraded the thin mPEI films.

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Section: Introductionmentioning

confidence: 99%

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

Barauskas

Park

Pelenis

et al. 2019

ACS Appl. Electron. Mater.

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Output pressure and pulse-echo characteristics of Capacitive Micromachined Ultrasonic Transducers as function of plate thickness

Cited by 1 publication

References 0 publications

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

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Output pressure and pulse-echo characteristics of Capacitive Micromachined Ultrasonic Transducers as function of plate thickness

Cited by 1 publication

References 0 publications

CO2 and SO2 Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

CO2 and SO2 Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

Contact Info

Product

Resources

About

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism

CO₂ and SO₂ Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism