Overlay metrology sampling capability analysis and implementation in manufacturing

A Literature Review on Sampling Techniques in Semiconductor Manufacturing

“…Song-Bor et al [44], Sullivan et al [45], Mouli et al [48], and Nduhura Munga et al [55] present industrial deployments of adaptive sampling plans in four different semiconductor companies: TSMC, IBM Microelectronics, Intel Corporation, and STMicroelectronics respectively.…”

“…A Sample Planner is developed by KLATencor to assist in the development of cost-effective defect inspection sampling strategies, and to provide an accurate assessment of whether monitor reduction and/or elimination should be pursued for cost savings. The results of the project indicate that the costs due to defect excursions could com- [33] 1995 * * Kuo et al [34] 1996 * * * Kuo et al [12] 1997 * * Babikian and Engelhard [35] 1998 * Williams et al [36] 1999 * * Williams et al [37] 1999 * * Langford et al [38] 2000 * * Nurani and Shantikumar [39] 2000 * * * Lee et al [40] 2001 * * Wootton et al [41] 2001 * * Allebé et al [42] 2002 * * Lee [43] 2002 * * Song-Bor et al [44] 2003 * * Sullivan et al [45] 2004 * * Moon et al [46] 2005 * * Boussetta and Cross [14] 2005 * * Mouli [13] 2005 * Shantikumar [47] 2007 * Mouli et al [48] 2007 * * Bunday et al [49] 2008 * Veetil et al [50] 2009 * * Chen et al [51] 2009 * * Sahnoun et al [52] 2010 * * Sahnoun et al [53] 2010 * * * Good et al [54] 2010 * * Nduhura Munga et al [55] 2011 * * pletely eradicate any projected savings from monitor reduction activities, due to the additional defect excursions that would be missed by the reduced inspection sampling plan. Wootton et al [41] present a study performed between KLA-Tencor and Motorola.…”

“…Sullivan et al [45] present an adaptive sampling technique for overlay measurements. The technique is based on a sampling capability ratio (CsK) analogous to the traditional CpK index 1 .…”

“…Most of the [40] Self-Organizing Feature (SOFM) network Lee [43] Artificial Neural Network (ANN) Sullivan et al [45] Skip-lot algorithm Mouli et al [48] Risk-Score evaluation algorithm Chen et al [51] Integer Linear Programming Sahnoun et al [52] Skip-Lot algorithm (risk reduction) Sahnoun et al [53] Skip-Lot algorithm (risk reduction) Good et al [54] Sampling Compensation Algorithm (SCA) Nduhura Munga et al [55] Permanent Index per Context (IPC) papers only use simulations to validate models [12] [50] but very few are industrialized.…”

Skipping algorithms for defect inspection using a dynamic control strategy in semiconductor manufacturing

“…In Static Sampling, the selection of lots is done at the beginning of the manufacturing process and does not change throughout production (Lee et al 2001). Adaptive sampling is based on adapting the sampling rate according to the state of production (Sullivan et al 2004, Mouli 2005and Song-bor et al 2003. In Dynamic Sampling, no rules are defined in advance, the selection of lots is done in real time and according to the information carried by the lot (Good andPurdy 2007 andDauzère-Pérès et al 2010).…”