Piezoelectric Transducers and Applications
DOI: 10.1007/978-3-540-77508-9_2
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Overview of Acoustic-Wave Microsensors

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Cited by 26 publications
(17 citation statements)
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“…The parameters that determine the resonance frequency are the spacing of IDTs and the thickness of the wave guiding layer. Typical frequencies in which this device operates are 80–300 MHz and the surface mass sensitivity reported for this device in literature is 150–500 cm 2 /g [29,63] .…”
Section: Sgaw Devices For Biosensingmentioning
confidence: 99%
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“…The parameters that determine the resonance frequency are the spacing of IDTs and the thickness of the wave guiding layer. Typical frequencies in which this device operates are 80–300 MHz and the surface mass sensitivity reported for this device in literature is 150–500 cm 2 /g [29,63] .…”
Section: Sgaw Devices For Biosensingmentioning
confidence: 99%
“…The parameter that determines the resonance frequency of this device is the spacing of IDTs and the thickness of the substrate. The typical operation frequency of this device is between 25–200 MHz and the surface mass sensitivity reported in literature is 20–50 cm 2 /g [29,31,63]. The most commonly used substrates for this device are ST-cut quartz and ZX-LiNbO 3 .…”
Section: Sgaw Devices For Biosensingmentioning
confidence: 99%
“…However, as usually several plate modes are excited and differ only slightly in the frequency, expensive evaluation electronics are required. The frequency range of FPW devices is only in the range of 5-20 MHz, and the devices are still fragile, which therefore means no advantage compared to QCMs [54][55][56][57].…”
Section: Introductionmentioning
confidence: 99%
“…Based on this effect, quartz crystal microbalances (QCMs) are the QCRs commonly employed as mass sensors in gas phase, in vacuum, and in contact with liquids in many bio-analytic applications [4,5,6,7,8,9]. There are basically three different operation modes for QCR sensors.…”
Section: Introductionmentioning
confidence: 99%