Abstract:This paper deals with an overview of recent microgrippers. As the end-effectors of micromanipulation systems, microgrippers are crucial point of such systems for their efficiency and their reliability. The performances of current microgrippers are presented and offer a stroke extending from 50 m to approximately 2 mm and a maximum forces varying from 0,1 mN to 600 mN. Then, micromanipulation system based on a piezoelectric microgripper and a SCARA robot is presented.
“…In order to build the expression of the dielectrophoresis torque, we consider a rotating electric field − − → E(t) whose norm is constant (see Consequently, the dipole momentum verifies − − → m(t) = 4πr 3 3 E 0 (Re(K(w)) cos(wt) + Im(K(w)) sin(wt)) − → x + (Re(K(w)) sin(wt) − Im(K(w)) cos(wt)) − → y (5.11) Thus, the dielectrophoresis torque applied on the object is done by −−→ DEP = 4πr 3 3 Im(K(w))E 2 0 (5.12)…”
Section: Dielectrophoresis Torquementioning
confidence: 99%
“…In the second step, the silane head-groups arriving close to the substrate hydrolyse, in the presence of the adsorbed water layer on the surface, into highly polar trihydroxysilane Si(OH) 3 or hydroxysilane Si(OH)(Me) 2 for, respectively, triethoxysilane Si(OEt) 3 (APTES) and ethoxysilane Si(OEt) (APDMES). These polar Si(OH) 3 or Si(OH) groups form covalent bonds with the hydroxyl groups on the SiO 2 surface (third step), subsequent to which the condensation reaction (release of water molecules) goes on between silanol functions of neighbor molecules. Self-assembly is driven by lipophilic interactions between the linear alkane moieties.…”
“…In order to build the expression of the dielectrophoresis torque, we consider a rotating electric field − − → E(t) whose norm is constant (see Consequently, the dipole momentum verifies − − → m(t) = 4πr 3 3 E 0 (Re(K(w)) cos(wt) + Im(K(w)) sin(wt)) − → x + (Re(K(w)) sin(wt) − Im(K(w)) cos(wt)) − → y (5.11) Thus, the dielectrophoresis torque applied on the object is done by −−→ DEP = 4πr 3 3 Im(K(w))E 2 0 (5.12)…”
Section: Dielectrophoresis Torquementioning
confidence: 99%
“…In the second step, the silane head-groups arriving close to the substrate hydrolyse, in the presence of the adsorbed water layer on the surface, into highly polar trihydroxysilane Si(OH) 3 or hydroxysilane Si(OH)(Me) 2 for, respectively, triethoxysilane Si(OEt) 3 (APTES) and ethoxysilane Si(OEt) (APDMES). These polar Si(OH) 3 or Si(OH) groups form covalent bonds with the hydroxyl groups on the SiO 2 surface (third step), subsequent to which the condensation reaction (release of water molecules) goes on between silanol functions of neighbor molecules. Self-assembly is driven by lipophilic interactions between the linear alkane moieties.…”
“…8) developed in the department AS2M of FEMTO-ST Institute is used for the handling of micro-objects [26]. It is a two-fingers gripping system with four dof (two dof by finger).…”
Section: Experimental Setup a Micromanipulation And Microassemblmentioning
Abstract-This paper investigates sequential robotic micromanipulation and microassembly in order to build 3-D microsystems and devices. A mono-view and multiple scale 2-D visual control scheme is implemented for that purpose. The imaging system used is a photon video microscope endowed with an active zoom enabling to work at multiple scales. It is modelled by a non-linear projective method where the relation between the focal length and the zoom factor is explicitly established. A distributed robotic system (xyθ system, φz system) with a twofingers gripping system is used in conjunction with the imaging system. The results of experiments demonstrate the relevance of the proposed approaches. The tasks were performed with the following accuracy: 1.4 µm for the positioning error, and 0.5• for the orientation error.
“…3.e) developed in the department AS2M of FEMTO-ST Institute is used for the handling of micro-objects (Agnus et al, 2005). It is a two-fingered microhandling system with four DOF (two DOF by finger).…”
This paper investigates sequential robotic microassembly for the construction of 3D micro-electro-mechanical systems (MEMS) structures using a 3D visual servoing approach. The previous solutions proposed in the literature for these kinds of problems are based on 2D visual control because of the lack of precise and robust 3D measures from the work scene. In this paper, the relevance of the real-time 3D visual tracking method and the 3D vision-based control law proposed is demonstrated. The 3D poses of the MEMS are supplied in real-time by a computer-aided design (CAD) model-based tracking algorithm. This latter is sufficiently accurate and robust to enable a precise regulation toward zero of the 3D error using the proposed pose-based visual servoing approach.Experiments on a microrobotic setup have been carried out to achieve assemblies of two or more 400 µm × 400 µm × 100 µm silicon micro-objects by their respective 97 µm × 97 µm × 100 µm notches with an assembly clearance from 1 µm to 5 µm. The different microassembly processes are performed with a mean error of 0.3 µm in position and 0.35×10 −2 rad in orientation.
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