Optical Diagnostics for Thin Film Processing 1996
DOI: 10.1016/b978-012342070-1/50002-4
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Overview of Optical Diagnostics

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Cited by 11 publications
(5 citation statements)
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“…A Kramers–Kronig consistent B-Spline fitting method was chosen to extract the optical constants of the DA InGaAs due to its flexibility and accuracy of approximating optical constants . For the ellipsometry measurement, the polarization change (ρ) of the reflected light is expressed as the ratio of its parallel ( r p ) and perpendicular ( r s ) components ρ = r normalp r normals = tan ( ψ ) e i normalΔ where ψ and Δ are the amplitude ratio and the phase difference of parallel ( r p ) and perpendicular ( r s ) components of the reflected light, respectively. , …”
Section: Resultsmentioning
confidence: 99%
“…A Kramers–Kronig consistent B-Spline fitting method was chosen to extract the optical constants of the DA InGaAs due to its flexibility and accuracy of approximating optical constants . For the ellipsometry measurement, the polarization change (ρ) of the reflected light is expressed as the ratio of its parallel ( r p ) and perpendicular ( r s ) components ρ = r normalp r normals = tan ( ψ ) e i normalΔ where ψ and Δ are the amplitude ratio and the phase difference of parallel ( r p ) and perpendicular ( r s ) components of the reflected light, respectively. , …”
Section: Resultsmentioning
confidence: 99%
“…11,12 Two types of passive ranging systems have been developed. One is based on range estimation and the modification of the optical portion of the system to have an OTF with periodically spaced zeros.…”
Section: Resultsmentioning
confidence: 99%
“…Previously, it has been demonstrated that the OSNR could be measured by linearly interpolating the ASE noise level at the carrier wavelength [10]- [11]. However, in a dynamically reconfigurable WDM network, each channel may traverse through different route and different number of optical amplifiers.…”
Section: Osnr Monitoring Techniquesmentioning
confidence: 99%
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“…From [ 25 ], it can be understood that both lines are featured by direct electron impact excitations with known process cross-sections [ 25 ] as well as exhibit very low lifetimes for corresponding excited states. The latter allows one to neglect their collisional relaxation pathway while the standard actinometrical approach [ 25 , 26 ] yields. where is the fluorine atom density, , is the total gas density at the given gas temperature , and is the actinometric coefficient.…”
Section: Experimental and Modeling Detailsmentioning
confidence: 99%