1987
DOI: 10.1111/j.1551-2916.1987.tb00069.x
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Oxidation Behavior of Chemically Vapor-Deposited Silicon Carbide

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Cited by 71 publications
(24 citation statements)
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“…Just at the transition, Equilibrium 20 is also valid (6) SiC(s) + 3/202(g ) ~--SiO2(s ) + CO(g) AG o (20) (7) with…”
Section: Molecular Oxygenmentioning
confidence: 97%
“…Just at the transition, Equilibrium 20 is also valid (6) SiC(s) + 3/202(g ) ~--SiO2(s ) + CO(g) AG o (20) (7) with…”
Section: Molecular Oxygenmentioning
confidence: 97%
“…However, the oxidation rates of CVD SiC were higher than those of sintered SiC due to the presence of free silicon. Schiroky [7] studied oxidation behaviour of CVD SiC at 1200-1800 • C. At >1500 • C, growth of uniform films of amorphous silica was observed and with bubble formation between 1700 and 1800 • C due to the high CO pressure at SiC-SiO 2 interfaces. Oxidation of CVD SiC was also investigated by Narushima et al [8] at 1550-1700 • C. They observed that the parabolic oxidation behaviour of CVD SiC consists of stage I and stage II as a result of a change in diffusion rate of oxygen in the SiO 2 film due to crystallization from amorphous silica to ␤-cristobalite.…”
Section: Introductionmentioning
confidence: 99%
“…We present results of a phenomenon that we term ÔmicroblowingÕ, where the SiO 2 scale produced by the oxidation of SiC is blown into complex shapes in a similar way to conventional glass blowing techniques. To the best of our knowledge, only simple bubbles have been previously reported e.g., [11,[21][22][23].…”
Section: Introductionmentioning
confidence: 96%
“…Silicon carbide based ceramics are known to be inherently unstable in oxidizing atmospheres, although they can exhibit oxidation resistance by the formation of a thin, dense and self healing protective silica film at the gas-solid interface [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. The oxidation process is well established as being initially rapid [2,3] with a brief (<1 h) linear region, followed by a parabolic region slowing down noticeably with progress of passive oxidation.…”
Section: Introductionmentioning
confidence: 99%