2023
DOI: 10.2139/ssrn.4637547
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Oxidation Characteristics of Copper Oxide Thin Films Deposited by Direct Current Sputtering Under Substrate Temperature and Post-Deposition Ion Implantation

Perumal Devaraj,
Pazhanisami Peranantham,
Kshetrimayum Devarani Devi
et al.
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