Oxidation effect on the SIMS analysis of samples sputtered and deposited by the Storing Matter technique

Мансилла, C.; Wirtz, Tom

doi:10.1016/j.apsusc.2012.02.064

Cited by 2 publications

(3 citation statements)

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“…Such a procedure has been applied recently and used for analysis of several materials. [4][5][6] So far, however, the processes of ion erosion/deposition and SIMS analysis are performed in two separate vacuum chambers. The substrate with the deposit has to be transported between the two chambers with the use of an ultra-high vacuum case.…”

Section: Introductionmentioning

confidence: 99%

“…Slodzian's idea is simple: to collect sputtered material during the process of ion erosion on to the substrate, with sub monolayer deposition and then to analyse the collected deposit with the SIMS technique. Such a procedure has been applied recently and used for analysis of several materials . So far, however, the processes of ion erosion/deposition and SIMS analysis are performed in two separate vacuum chambers.…”

Section: Introductionmentioning

confidence: 99%

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Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Konarski

Miśnik

Zawada

et al. 2014

Surface & Interface Analysis

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The storing matter technique is applied in quadrupole type SIMS analyser. Its analytical chamber is additionally equipped with a special magnetically driven x, Θ, UHV manipulator applied for transfer of the metal ring collector. The sample holder, horizontally positioned, carries the analysed sample as well as a watch like rotation mechanism carrying a continuously rotating collector of 1 inch diameter at a rate of 1 rev. per hour. The procedure includes cleaning of the collector with the ion beam, the collector reverse, sputter deposition of the analysed material from the sample onto the clean surface of the collector, reversal of the sample and analysis of the stored material. The whole procedure is performed in one analytical chamber, using a Physical Electronics 06-350E sputter ion gun and QMA-410 Balzers quadrupole mass analyser. The procedure is tested on pure chromium and is applied to an inconel alloy implanted with 120 keV Cr 2+ and 145 keV Y 2+. The SIMS results are obtained using 5 and 3 keV Ar + ion beam at 45°incidence angle. As the collector, we use high purity titanium. The obtained depth profile analysis of the inconel alloy shows that the 'matrix effect' is largely reduced when compared with standard SIMS analysis. The storing matter procedure was performed with the use of oxygen flooding (during sputter deposition and during SIMS analysis). Results show significant improvement with respect to the use of this technique without oxygen flooding.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Konarski

Miśnik

Zawada

et al. 2014

Surface & Interface Analysis

View full text Add to dashboard Cite

show abstract

“…To indicate the presence of the so‐called matrix effect, we use the SIMS useful yield U Y SIMS defined as the ratio of the number of detected ions and the number of sputtered atoms from the analysed sample. In order to circumvent the so‐called matrix effect, the storing matter technique proceeds in two steps. First, the sample is sputter‐deposited onto a well‐defined collector.…”

Section: Introductionmentioning

confidence: 99%

Si⁻ useful yields measured in Si, SiC, Si₃N₄ and SiO₂: comparison between the Storing Matter technique and SIMS

Kasel

Wirtz

2014

Surface & Interface Analysis

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The storing matter technique was developed to tackle quantification issues encountered in SIMS due to matrix effects. Here, we demonstrate the quantitative capabilities of the technique by comparing the useful yield for Si in different matrices exhibiting matrix effects in conventional SIMS analysis. Additionally, the effect of the collector material (Ag, Au, Cu and Ta) on the storing matter useful yield is investigated.

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Oxidation effect on the SIMS analysis of samples sputtered and deposited by the Storing Matter technique

Cited by 2 publications

References 16 publications

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Si⁻ useful yields measured in Si, SiC, Si₃N₄ and SiO₂: comparison between the Storing Matter technique and SIMS

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Oxidation effect on the SIMS analysis of samples sputtered and deposited by the Storing Matter technique

Cited by 2 publications

References 16 publications

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Si− useful yields measured in Si, SiC, Si3N4 and SiO2: comparison between the Storing Matter technique and SIMS

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Si⁻ useful yields measured in Si, SiC, Si₃N₄ and SiO₂: comparison between the Storing Matter technique and SIMS