Quantitative prediction of voids formation is demonstrated for CoO scale formed at 1373 K. Calculations of ion fluxes and their divergence in CoO scales can predict the void formation in the scale which mostly occurs in the vicinity of the metal/oxide interface. The volume fraction of voids is found to be maximum at the initial surface. These predictions are in good agreement with the observed morphology of CoO scale obtained in high temperature oxidation of cobalt at 1373 K.