Oxidation of polycrystalline copper films – Pressure and temperature dependence

Maack, Björn; Nilius, Niklas

doi:10.1016/j.tsf.2018.02.007

Cited by 28 publications

(30 citation statements)

References 36 publications

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“…At the employed conditions, the reaction typically lasted for 2400 s and produced more than 2000 transmission spectra per experimental run. Shorter (longer) oxidation times were realized by increasing (decreasing) the oxidation temperature or increasing (lowering) the O 2 pressure, as discussed in previous studies …”

Section: Methodssupporting

confidence: 51%

“…To monitor the time evolution of Cu to Cu 2 O conversion, optical transmission spectra were recorded during the oxidation procedure. The spectra were fitted with a user‐programmed software to appropriate three‐layer models of the sample, composed of a homogenous Cu 2 O top, a Cu bottom, and a Cu 2 O–Cu mixed layer in between (Figure ) . The interfacial layer accounts for an inhomogeneous metal‐oxide reaction front and mimics an oxidation process that proceeds along grain boundaries of the material .…”

Section: Resultsmentioning

confidence: 99%

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Impact of Granularity on the Oxidation Kinetics of Copper

Maack

Nilius

2020

Physica Status Solidi (b)

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Polycrystalline copper films with mean grain sizes varying by three orders of magnitude are prepared to correlate morphology and oxidation kinetics of metals. The films are oxidized to cuprous oxide at well‐defined pressure and temperature conditions, monitoring the progress of the reaction by in situ optical transmission spectroscopy. The oxidation kinetics is retrieved by fitting the optical data to a three‐layer Cu2O/Cu2O–Cu/Cu model with the central layer accounting for the inhomogeneity of the oxidation front due to grain boundaries. The analysis reveals the highest oxidation rates for Cu films with finest granularity, demonstrating the decisive role of grain boundaries for Cu mass transport during oxidation. Moreover, reaction rates are found to differ by one order of magnitude for oxidation along the grain boundaries and into the crystalline Cu grains. In fact, slow oxidation into the Cu crystallites is responsible for an incomplete metal‐oxide conversion in the case of coarse‐granular films. The experiments demonstrate the direct interplay between morphology and oxidation kinetics for metals.

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Section: Methodssupporting

confidence: 51%

Section: Resultsmentioning

confidence: 99%

Impact of Granularity on the Oxidation Kinetics of Copper

Maack

Nilius

2020

Physica Status Solidi (b)

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“…In addition, the amount of water was carefully chosen to ensure a complete dissolution of solid precursor in the liquid feedstock, because adding 10 vol% water would result in the partial dissolution of Cu(acac) 2 precursor. After deposition, the samples were taken out from the CVD reactor after cooling down to room temperature, because the assumed Cu 2 O bulk phase might have been oxidized to CuO directly at the surface, as the sample was transported through air prior to measurements [49].…”

Section: Methodsmentioning

confidence: 99%

Enhanced property of thin cuprous oxide film prepared through green synthetic route

Kasmi

Vieker

et al. 2019

Chinese Journal of Chemical Physics

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Thin cuprous oxide films have been prepared by chemical vapor deposition (pulsed spray evaporation-chemical vapor deposition) method without post-treatment. The synthesis of cuprous oxide was produced by applying a water strategy effect. Then, the effect of water on the morphology, topology, structure, optical properties and surface composition of the obtained films has been comprehensively investigated. The results reveal that a pure phase of Cu 2 O was obtained. The introduction of a small quantity of water in the liquid feedstock lowers the band gap energy from 2.16 eV to 2.04 eV. This finding was mainly related to the decrease of crystallite size due to the effect of water. The topology analyses, by using atomic force microscope, also revealed that surface roughness decreases with water addition, namely more uniform covered surface. Moreover, theoretical calculations based on density functional theory method were performed to understand the adsorption and reaction behaviors of water and ethanol on the Cu 2 O thin film surface. Formation mechanism of the Cu 2 O thin film was also suggested and discussed.

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“…The method is based on changes of the optical transmittance of metal films upon oxidation and neither restricted to low pressures nor temperatures. It was recently utilized to analyze the oxidation behavior of copper at O 2 pressures between 10 À3 and 100 mbar and temperatures between 400 and 700 K. [21] The experiments revealed that the Cabrera-Mott mechanism is decisive only in early stages of the reaction, whereas Cu mass transport along grain boundaries becomes relevant later in the process. [22] Also, the Cu 2 O to CuO phase transition at 550 K renders the oxidation behavior different from the one expected for simple metals.…”

Section: Introductionmentioning

confidence: 99%

Growth of Self‐Passivating Oxide Layers on Aluminum—Pressure and Temperature Dependence

Gorobez

Maack

Nilius

2021

Physica Status Solidi (b)

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Optical transmission spectroscopy is used to monitor the in situ oxidation of granular aluminum films over a wide range of temperatures and pressures. By fitting the time evolution of the transmission to adequate geometric models, the rising transparency of the sample is converted into oxide growth during reaction. The observed oxidation rates increase steeply with temperature, but depend on pressure only below 100 mbar O 2 and become pressure-independent above. The Al oxidation proceeds in two regimes. The initial fast one is compatible with the Cabrera-Mott mechanism of an electric-field-driven process and self-terminates at 1-2 nm oxide thickness depending on oxidation conditions. The subsequent slow regime exhibits a two times larger activation energy and is relevant only for hightemperature oxidation. It is assigned to the thermally activated transport of Al ions through the emerging oxide layer. In contrast to the initial Cabrera-Mott process, it shows no self-passivation and enables oxide thickening beyond 2 nm.

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Oxidation of polycrystalline copper films – Pressure and temperature dependence

Cited by 28 publications

References 36 publications

Impact of Granularity on the Oxidation Kinetics of Copper

Impact of Granularity on the Oxidation Kinetics of Copper

Enhanced property of thin cuprous oxide film prepared through green synthetic route

Growth of Self‐Passivating Oxide Layers on Aluminum—Pressure and Temperature Dependence

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