“…In recently years, the addition of boron was found can improve exhibit excellent hardness, high melting point, good chemical and thermal stability [9], so the investigation of the ternary [10][11][12][13] and quaternary systems [14][15][16][17] which contain element B became hot study and development trend gradually, especially the study on the TiBCN film. But there are many problems exist and still cannot be solved of TiBCN film, such as film oxidation, breakage, evaporation, high cost, and so on [18]. It is like that TiBCN parts will be come into use earlier than film materials.…”