Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review

Eranna, G.; Joshi, B. C.; Runthala, D. P.; Gupta, Ram P.

doi:10.1080/10408430490888977

Cited by 985 publications

(628 citation statements)

References 271 publications

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“…Metal oxide sensors are under intensive development and have been studied for decades [18,19]. In metal oxide sensors, the electrical resistance of the film changes when exposed to a target gas.…”

Section: Open Accessmentioning

confidence: 99%

Fabrication of Pd Doped WO3 Nanofiber as Hydrogen Sensor

2013

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Pd doped WO 3 fibers were synthesized by electro-spinning. The sol gel method was employed to prepare peroxopolytungstic acid (P-PTA). Palladium chloride and Polyvinyl pyrrolidone (PVP) was dissolved in the sol Pd:WO 3 = 10% molar ratio. The prepared sol was loaded into a syringe connected to a high voltage of 18.3 kV and electrospun fibers were collected on the alumina substrates. Scanning electron microscope (SEM), X-ray powder diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) techniques were used to analyze the crystal structure and chemical composition of the fibers after heat treatment at 500 °C. Resistance-sensing measurements exhibited a sensitivity of about 30 at 500 ppm hydrogen in air, and the response and recovery times were about 20 and 30 s, respectively, at 300 °C. Hydrogen gas sensing mechanism of the sensor was also studied.

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Section: Open Accessmentioning

confidence: 99%

Fabrication of Pd Doped WO3 Nanofiber as Hydrogen Sensor

2013

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“…It has fascinating properties such as strong interaction between certain poisonous gas molecules and its surfaces 3 . These properties make In 2 O 3 , a remarkable material for a variety of applications such as solar cells 4 , Liquid Crystal Displays 5 , Architectural Glasses 6 , Gas Sensors 7 , Flat Panel Display 8 , and in Photo-catalytic conversions 9 . To widen the technological applications of In 2 O 3 , investigations were made to synthesize them in different forms such as nanotubes, nanobelts, nano wires and nanoparticles.…”

Section: Introductionmentioning

confidence: 99%

Effect of Capping Agent on the Morphology, Size and Optical Properties of In2O3 Nanoparticles

et al. 2017

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The Indium Oxide (In 2 O 3 ) nanoparticles were synthesized through Acacia gum mediated method with the surfactants CTAB (Cetyl Trimethyl Ammonium Bromide) and SDBS (Sodium Docecyl Benzene Sulfonate). The characterization of the synthesized In 2 O 3 nanoparticles was carried out by XRD, FTIR, RAMAN, TEM, SEM, EDAX, UV-Vis and PL techniques. TG-DTA analysis was performed to know the calcination temperature of In 2 O 3 nanoparticles. XRD analysis confirmed the crystalline nature of the synthesized In 2 O 3 nanoparticles. The morphology and chemical composition were characterized by TEM, SEM and EDAX respectively. It was observed that morphology and size of synthesized nanoparticles measured by TEM and SEM analysis were dependent on the type of capping agent (surfactant) used. Raman and UV-Vis spectral analysis confirmed that the band gap value of CTAB capped In 2 O 3 particles were larger than the SDBS capped In 2 O 3 particles. FTIR analysis indicated that the bands were stretched in In 2 O 3 particles capped by SDBS than by CTAB. From the photoluminescence studies (PL technique), a blue shift in the emission peaks of CTAB and SDBS capped In 2 O 3 particles was observed that indicates larger optical band gap than the bulk.

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“…Bulk sensors, which represent important analytical devices for air monitoring in domestic and industrial environments, exhibit some shortcomings that can be circumvented by modern film technologies. Gas sensors, in thin or thick film forms, are more promising detectors due to their potentially low cost, ruggedness and low electric power consumption 1 . Another important advantage in the use of micro and nanostructured films is the high surface to volume ratio, offering faster responses and higher sensibilities.…”

Section: Introductionmentioning

confidence: 99%

“…Semiconducting oxide sensors have been intensively studied due to their high sensitivity to a large number of gases [1][2][3][4][5][6][7][8][9][10][11][12][13][14] . The most studied among those oxides is pure or doped tin oxide (SnO 2 ) obtained in different forms, from powders and bulk ceramics [2][3][4][5] , to thick and thin films [4][5][6][7][8][9][10][11][12][13][14] .…”

Section: Introductionmentioning

confidence: 99%

“…For gas sensing applications the desirable characteristics are high porosity, small grain size and either low or high conductivity (for reducing or oxidizing gases, respectively) [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] . Sputtering is a preferred technique among the physical vapor deposition (PVD) methods due to the wide choice of materials to work with, better step coverage, the possibility to deposit over large areas and better adhesion between the films and the substrate 1,[10][11][12][13]15 . The sensing characteristics of film based devices (sensitivity, response and recovery time) are greatly affected by film structure, morphology and thickness.…”

Section: Introductionmentioning

confidence: 99%

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Grain size effect on the electrical response of SnO2 thin and thick film gas sensors

et al. 2009

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Porous nano and micro crystalline tin oxide films were deposited by RF Magnetron Sputtering and doctor blade techniques, respectively. Electrical resistance and impedance spectroscopy measurements, as a function of temperature and atmosphere, were performed in order to determine the influence of the microstructure and working conditions over the electrical response of the sensors. The conductivity of all samples increases with the temperature and decreases in oxygen, as expected for an n-type semiconducting material. The impedance plots indicated the existence of two time constants related to the grains and the grain boundaries. The Nyquist diagrams at low frequencies revealed the changes that took place in the grain boundary region, with the contribution of the grains being indicated by the formation of a second semicircle at high frequencies. The better sensing performance of the doctor bladed samples can be explained by their lower initial resistance values, bigger grain sizes and higher porosity.

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Oxide Materials for Development of Integrated Gas Sensors—A Comprehensive Review

Cited by 985 publications

References 271 publications

Fabrication of Pd Doped WO3 Nanofiber as Hydrogen Sensor

Fabrication of Pd Doped WO3 Nanofiber as Hydrogen Sensor

Effect of Capping Agent on the Morphology, Size and Optical Properties of In2O3 Nanoparticles

Grain size effect on the electrical response of SnO2 thin and thick film gas sensors

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