Oxide Microtubes Fabrication with 10μm to 5μm Pitches and Assembly Characterization

Natacha, Raphoz; Patrick, Peray; Frédéric, Berger; Olivier, Mailliart; Cloé, Desbordes; Alain, Gueugnot

doi:10.1109/icsj62869.2024.10804673

2024 IEEE CPMT Symposium Japan (ICSJ) 2024

DOI: 10.1109/icsj62869.2024.10804673

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Oxide Microtubes Fabrication with 10μm to 5μm Pitches and Assembly Characterization

Raphoz Natacha,

Peray Patrick,

Berger Frédéric

et al.

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Oxide Microtubes Fabrication with 10μm to 5μm Pitches and Assembly Characterization

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