and low-cost fabrication is required. Ideally, one would like to have low-cost and cm 2 sized chips, which provide plasmonic resonance over the whole area and can be simply put into standard infrared spectrometers, serving as smart substrates for the detection and identifi cation of biological or chemical substances. Randomly distributed metal island fi lms [ 10,11 ] or metal stripe gratings [ 12 ] enable such large-area fabrication, but their plasmonic enhancement is orders of magnitudes smaller than the one of tailored nanoantennas. In contrast, metal antennas prepared by bottomup approaches, such as nanosphere lithography, [13][14][15] offer higher enhancements but suffer from inhomogeneity on large scales. Recently, colloidal hole mask lithography [ 16,17 ] has been introduced as an approach to fabricate tailored nanostructures that provide high near-fi eld enhancements. However, due to intrinsic limitations of the method, only randomly distributed antennas can be realized. Other methods, like nanoimprint techniques, have their own limitation such as a slow fabrication process of mask. [18][19][20] In contrast laser interference lithography enables a fast preparation of tailored polymer and metal structures arranged in welldefi ned geometries on large scales up to 4 inches, [ 21 ] with a high structure density. [ 22 ] These characteristics make laser interference lithography a powerful tool for the fabrication of plasmonic materials with a broad range of applications, for example, plasmonic color fi ltering [ 23 ] or biosensing. [ 24,25 ] Also, the fabrication of substrates for antenna-assisted SEIRA is enabled by this fl exible approach as we will demonstrate in this paper.In particular, we will highlight the potential of laser interference lithography as a powerful tool for the fast and low-cost preparation of homogeneous large-area substrates for antennaassisted SEIRA. More specifi cally, we utilized laser interference lithography to prepare tailored metal structures featuring highquality plasmon resonances in the near-and mid-infrared spectral range. These substrates provide excellent SEIRA activity as we demonstrate with two different molecular layers attached to the antennas. Furthermore, they enable sensitive in situ monitoring of the UV degradation of polymers via the signal contrast in their vibrational spectra.
Laser Interference LithographyThe interference of two coherent laser beams with wavelength λ causes a standing wave grating pattern which can be used Laser interference lithography is utilized to fabricate large-area plasmonic antenna substrates for surface-enhanced infrared absorption (SEIRA). Changing the interference condition in each exposure process allows precise control over the geometrical parameters of the structures and thus tailoring of their optical response. Independent of the underlying wafer, the technique enables a homogeneous preparation of antennas over cm 2 areas with tunable and high-quality plasmonic resonances in the near-and mid-infrared spectral range. The broad applic...