2002
DOI: 10.1142/9789812778062_0001
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Oxide Wearout, Breakdown, and Reliability

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Cited by 11 publications
(5 citation statements)
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References 297 publications
(425 reference statements)
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“…In this respect, we shed light in this section on the structural damage that occurs during the BD current transient. In ultra-thin dielectric layers (<5 nm), there is a wide consensus around considering that the intrinsic BD is related to the generation of defects in the dielectric film [ 163 , 164 , 165 , 166 ]. When the density of bulk defects is high enough, the BD event is triggered by the local connection of the electrodes through a defect related conduction path.…”
Section: Thermometry Of Conducting Filamentsmentioning
confidence: 99%
“…In this respect, we shed light in this section on the structural damage that occurs during the BD current transient. In ultra-thin dielectric layers (<5 nm), there is a wide consensus around considering that the intrinsic BD is related to the generation of defects in the dielectric film [ 163 , 164 , 165 , 166 ]. When the density of bulk defects is high enough, the BD event is triggered by the local connection of the electrodes through a defect related conduction path.…”
Section: Thermometry Of Conducting Filamentsmentioning
confidence: 99%
“…Using the integrated coil approach, SiO 2 , the intermetal filling of the CMOS process behaves as the isolation barrier. Following the reported mean time to failure of 450 V/µm for 20 years [12], and 2 µm of spacing between process second and the top metal layer, above 900 V of isolation working voltage (V iso ) is achieved in this design. Further increase of the V iso can be obtained through a smaller process with a greater number of metal layers and consequently a thicker isolation barrier.…”
Section: Integrated Spiral Coilmentioning
confidence: 83%
“…Texas Instrument ISO72xx [14]). Based on the oxide deterioration profile reported in [15], one micron of oxide has an isolation breakdown voltage of 0.45 MV/mm. Hence, having 2 μm of oxide, theoretical 900 V of isolation working voltage (V iso ) is expected.…”
Section: Integrated Spiral Coilsmentioning
confidence: 99%