Oxygen Gas Barrier Properties of Hydrogenated Amorphous Carbon Thin Films Deposited with a Pulse-Biased Inductively Coupled Plasma Chemical Vapor Deposition Method

Abstract

Hydrogenated amorphous carbon (a-C:H) films have been deposited on poly(ethylene terephthalate) (PET) films with an pulse-biased inductively coupled plasma chemical vapor deposition method using CH 4 and C 2 H 2 gases. We have investigated the effects of the pulse-bias frequency on the oxygen transmission rate (OTR) of the a-C:H-coated PET sample, and discussed relationship between the OTR characteristics and the structure of the films based on the results of Raman and infrared absorption spectroscopy. In case of CH 4 plasmas, the OTR of the sample has been reduced down to 1.12 cm 3 /(m 2 ÁdayÁatm) by increasing the bias-frequency to 2 kHz, and the structure of the a-C:H films has been modified from polymer-like to tetrahedral one. In case of C 2 H 2 plasmas, the OTR of the samples has been 1.18 cm 3 /(m 2 ÁdayÁatm) with the lower bias frequency of 0.5 kHz, and has not shown strong dependence on the pulse-bias frequency. This has been explained by the fact that the films prepared with C 2 H 2 plasma can be modified to tetrahedral structures by applying the bias with the lower frequency. #

Study of the synthesis of C:H coating by PECVD for protecting Mg‐based nano‐objects

“…The absence of sp 2 signature characterized by the nondetection of the associated G (1,580 cm −1 ) and D (1,350 cm −1 ) peaks indicates the formation in our experimental window of a hydrogenated polymer‐like layer mainly composed of sp 3 hybridized carbon validating our previous observation regarding the range of hardness measured. [ 35 ] These conclusions are further confirmed by FTIR measurements (Figure 8) also revealing the absence of sp 2 signature in the spectra. Indeed, mainly CH 3 (i.e., antisymmetric stretching at 2,957 cm −1 , antisymmetric bending at 1,454–1,456 cm −1 and symmetric bending at 1,375–1,381 cm −1 ) and CH 2 (i.e., antisymmetric stretching at 2,932–2,939 cm −1 , symmetric stretching at 2,872–2,879 cm −1 , and symmetric bending at 1,454–1,456 cm −1 ) vibration modes are identified.…”

Fabrication of Transparent Protective Diamond-Like Carbon Films on Polymer

“…Si-doped DLC (hereafter Si-DLC) films were prepared using a pulse-biased ICP-CVD system 18) under the following conditions. The films were deposited from a mixture of C 2 H 2 gas and TMS on polycarbonate (PC), Si(100), and glass substrates.…”

Preparation of Diamond-Like Carbon on Ti Film with Tetramethylsilane Buffer Layer

“…1) Many methods have been develped to improve the basic properties of titanium devices. 2,3) Diamond-like carbon (DLC) is a well-known coating material for a wide range of fields from wrist watches to car motors [4][5][6][7] owing to its high durability, high hardness, and low friction. DLC has been widely studied from many aspects such as hydrogen content, bond components, and mass density.…”