Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XIX 2022
DOI: 10.1117/12.2633278
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Oxygen mediated optical and electrical property modification of RF sputtered Ga2O3 thin films for photodetector application

Abstract: The deep UV photodetectors (DUV-PDs) are technologically important for diverse applications, ranging from environmental monitoring, space communication etc. Among all solar blind materials Ga2O3 thin film shows its strong contention owing to its intrinsic solar-blind nature. However, the PD’s efficiency can be significantly affected by the defects such as oxygen vacancies (VO). Both the deficiency and surplus of oxygen during Ga2O3 thin film deposition can result in the formation of carrier scattering centers,… Show more

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