Oxygen transport from a silica crucible in Czochralski silicon growth

The influence of crystallographic orientation on the wetting of silicon on quartz single crystals

“…In investigations of silicon crystal growth from a melt in fused quartz crucibles [19][20][21][22][23][24]26] oxygen is observed to dissolve from the quartz into the silicon melt. The oxygen solubility in the Si melt is very small [14,15], but it is well known Fig.…”

“…Moreover a detailed physical-chemical understanding of reactive wetting between liquid silicon melt and SiO 2 is important for the advanced crystal growth of silicon [16][17][18][19][20][21][22][23][24][25][26][27]. Several wetting experiments with silicon melt on fused quartz have been reported in the literature [25][26][27], and complex dynamical spreading effects have been observed.…”

Transient 3D simulation of Czochralski crystal growth considering diameter variations

“…For the simulations, a cylindrical crucible geometry from Togawa et al [9] is used. The crucible has a diameter of 178 mm, the crystal of 82 mm.…”

Thermal optimization of CZ bulk growth and wafer annealing for crystalline dislocation-free silicon

“…The ''Redmet-90M'' was equipped with two kinds of thermal shields, one with water cooling and the other without it [1]. This study determined the influence of varying crucible rotation rates on the temperature field of the melt, which represents the essential scientific and practical interest [2]. In this work, the influence of azimuthal melt velocity on a shape of liquid-solid interface (LSI) was considered.…”