Ozone sensors on the base of SnO2 films deposited by spray pyrolysis

Korotcenkov, Ghenadii; Blinov, I.; Ivanov, Maxim; Stetter, Joseph R.

doi:10.1016/j.snb.2006.03.029

Cited by 88 publications

(74 citation statements)

References 40 publications

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“…The thickness of the SnO 2 films, equal to ~40-50 nm, was chosen because of the need to achieve optimal parameters of gas sensors. According to [36], these thicknesses provide maximum sensor response to ozone at a minimum response time. At such thicknesses, diffusion processes do not limit the kinetics of the sensor response.…”

Section: Methodsmentioning

confidence: 99%

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

Korotcenkov

Brînzari

Gulina

et al. 2015

Applied Surface Science

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Section: Methodsmentioning

confidence: 99%

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

Korotcenkov

Brînzari

Gulina

et al. 2015

Applied Surface Science

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“…[29][30][31][32][33] SnO 2 , In 2 O 3 and WO 3 compounds have been considered the most promising ozone gas sensors.…”

Section: 2941mentioning

confidence: 99%

A novel ozone gas sensor based on one-dimensional (1D) α-Ag₂WO₄ nanostructures

et al. 2014

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aThis paper reports on a new ozone gas sensor based on a-Ag 2 WO 4 nanorod-like structures. Electrical resistance measurements proved the efficiency of a-Ag 2 WO 4 nanorods, which rendered good sensitivity even for a low ozone concentration (80 ppb), a fast response and a short recovery time at 300 C, demonstrating great potential for a variety of applications.Metal semiconducting oxides have drawn the interest of many researchers due to their wide range of applications, especially as gas sensing materials. 1-5 Among them, one-dimensional (1-D) semiconductor nanostructures have been proposed as very interesting materials, especially as gas sensor devices.6-12 It is well known that several technological applications of nanostructured materials are directly related to the morphology, particle size, crystalline phase and activity of specic crystalline planes strictly dependent on synthesis methods. 4,[13][14][15] In particular, the relationship between morphology and gas sensing properties has been well established. 4,16,17Tungsten-based oxides are an important class of materials that display wide potential functional properties, 18-20 speci-cally the silver tungstate (Ag 2 WO 4 ) compound, which can exhibit three different structures: a-orthorhombic, b-hexagonal, and g-cubic.21-25 Recently, our research group reported a detailed study of the synthesis, structural and optical properties of hexagonal nanorod-like elongated a-Ag 2 WO 4 nanocrystals obtained by different methods. 26-28Ozone (O 3 ) is an oxidizing gas used in many technological applications in different areas, such as the food industry, drinking-water treatment, medicine, microelectronic cleaning processes, and others.29,34-39 For example, ozone has been employed as a powerful drinking-water disinfectant and oxidant. 34,35,40 On the other hand, when the ozone level in an atmosphere exceeds a certain threshold value, the exposure to this gas becomes hazardous to human health and can cause serious health problems (e.g. headache, burning eyes, respiratory irritation and lung damage).34,41 The European Guidelines (2002/3/EG) recommend avoiding exposure to ozone levels above 120 ppb.41 Such arguments support the requirement for the determination and continuous monitoring of ozone levels. 3,29,41Gas sensing properties are evaluated in terms of operating temperature, sensitivity, response time, recovery time and stability.29-33 SnO 2 , In 2 O 3 and WO 3 compounds have been considered the most promising ozone gas sensors. 29-33To the best of our knowledge, to date the gas sensing properties of a-Ag 2 WO 4 nanocrystals have never been evaluated.Here, we report the sensing properties of 1-D a-Ag 2 WO 4 nanorod-like structures obtained by the microwave-assisted hydrothermal (MAH) method.42-46 Because of such properties, nanorods are potential candidates for practical applications as ozone gas sensors.The crystalline phase of the as-obtained a-Ag 2 WO 4 sample was analyzed by X-ray diffraction measurement and all reec-tions were indexed to an orthorhombic struc...

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“…Among several sensing materials, SnO 2 has been shown to be sensitive toward gases in a variety of papers however metal oxide sensors typically require high operating temperatures to achieve good sensitivity and fast recovery resulting in mW of power consumption making them unsuitable for portable monitoring. [3][4][5][6] Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation.…”

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confidence: 99%

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Mills¹,

Lim²,

Lee³

et al. 2015

ECS J. Solid State Sci. Technol.

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This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO 2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO 2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems. High levels of ozone (O 3 ) have been shown to contribute to respiratory symptoms such as chronic cough, wheeze, and shortness of breath and chest colds with phlegm.1 Individuals suffering with respiratory diseases such as asthma are particularly sensitive to O 3 which can trigger an asthma attack hours after exposure.2 According to the Environmental Protection Agency, O 3 concentrations are higher near urban areas, highways and in general outside on hot sunny days highlighting the need for continuous, portable, real time monitoring of an individual's exposure levels in order to correlate personal health with surrounding environments. Sensors used for these applications must have high sensitivity, appropriate selectivity against other gases, low total power consumption, stability, accuracy, reliability and low cost. Among several sensing materials, SnO 2 has been shown to be sensitive toward gases in a variety of papers however metal oxide sensors typically require high operating temperatures to achieve good sensitivity and fast recovery resulting in mW of power consumption making them unsuitable for portable monitoring.3-6 Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively. These methods enable detection of 10s of ppb of ozone with room temperature operation for average power consumption of just 150 μW. Additionally, our sensors demonstrate selectivity over interfering gases NO 2 and CO at typical atmospheric levels making them good candidates for continuous, portable monitoring. ExperimentalThe fabrication of sensor device started with 500nm thermal oxidation of Si (100) substrate for electrical isolation. After oxidation, the SnO 2 sensing material was deposited in an ALD system (Cambridge Nanotech Savannah 100 model). Tetrakis(dimethylamino)tin precursor and O 3 reactants were used to deposit SnO 2 at 200• C. The films were...

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Ozone sensors on the base of SnO2 films deposited by spray pyrolysis

Cited by 88 publications

References 40 publications

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

A novel ozone gas sensor based on one-dimensional (1D) α-Ag₂WO₄ nanostructures

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

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Ozone sensors on the base of SnO2 films deposited by spray pyrolysis

Cited by 88 publications

References 40 publications

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

The influence of gold nanoparticles on the conductivity response of SnO2-based thin film gas sensors

A novel ozone gas sensor based on one-dimensional (1D) α-Ag2WO4 nanostructures

Atomic Layer Deposition of SnO2for Selective Room Temperature Low ppb Level O3Sensing

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A novel ozone gas sensor based on one-dimensional (1D) α-Ag₂WO₄ nanostructures

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing