2019
DOI: 10.1002/sdtp.13160
|View full text |Cite
|
Sign up to set email alerts
|

P‐11: Carrier Concentration Reduction by Fluorine Doping in P‐Type SnO Thin‐Film Transistors

Abstract: Presently reported is the use of plasma fluorination treatment based on tetrafluoromethane to enhance the performance of a p-type SnO thin-film transistor (TFT). The improved performance metrics include a larger on/off current ratio, a smaller subthreshold swing and a reduction of an originally large positive turn-on voltage. The effects of such fluorination treatment were also investigated using a host of thin-film characterization techniques and their origin most plausibly attributed to both the significant … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
3
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(3 citation statements)
references
References 11 publications
0
3
0
Order By: Relevance
“…Wang et al used fluorine doping in SnO TFTs to passivate the defects and significantly reduced the carrier concentration from ≈2 × 10 19 to ≈4.3 × 10 16 cm −3 . [185] Hung et al doped SnO with Y 3+ to suppress the formation of SnO 2 phase in SnO TFTs, decreased I OFF from 2 × 10 −9 to 3 × 10 −12 A μm -1 . [183e] NiO is also the material of interest for p-type TFTs, owing to its better chemical stability compared to Cu 2 O and SnO.…”
Section: P-type Oxide Tfts and Cmos Devicesmentioning
confidence: 99%
“…Wang et al used fluorine doping in SnO TFTs to passivate the defects and significantly reduced the carrier concentration from ≈2 × 10 19 to ≈4.3 × 10 16 cm −3 . [185] Hung et al doped SnO with Y 3+ to suppress the formation of SnO 2 phase in SnO TFTs, decreased I OFF from 2 × 10 −9 to 3 × 10 −12 A μm -1 . [183e] NiO is also the material of interest for p-type TFTs, owing to its better chemical stability compared to Cu 2 O and SnO.…”
Section: P-type Oxide Tfts and Cmos Devicesmentioning
confidence: 99%
“…Aliovalent doping might be a good way to solve this problem, decreasing carrier concentration and lowering IOFF. For example, Wang et al used fluorine doping in SnO TFTs to passivate the defects, reduced the carrier concentration from ~ 2 × 10 19 cm -3 to ~ 4.3 × 10 16 cm -3 [30].…”
Section: Sno Based Devicesmentioning
confidence: 99%
“…Normally, color filters are essential for LCD to produce RGB images, but the residual color filter reduces the light transmission efficiency seriously 5,6 . Compared with LCDs with color filters, the field-sequential-color liquid crystal display (FSC LCD) is a promising candidate for next-generation LCD technology since no color filters are required in this structure 7 . This technology takes the advantage of visual persistence effect of the human eye.…”
Section: Introductionmentioning
confidence: 99%