2017
DOI: 10.1002/sdtp.12009
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P‐175: Direct Electron Beam Micropatterning and Thermal Annealing of Organic Light Emitting Devices

Abstract: An approach for direct electron beam micropatterning is presented, whereby the emission of an organic light-emitting diode (OLED) can be modified at high-resolution by using a focused electron beam through its encapsulation. By subsequent thermal annealing it is possible to tune the optical and electrical properties of the OLED.

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Cited by 2 publications
(5 citation statements)
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“…To form a micropattern directly onto the polymer devices after completing the entire fabrication process, we employed a heat-induced modification method used for organic materials. Recently, an approach for the local modification of emissive regions in OLEDs was suggested; , however, that process involved a focused electron beam, which requires high vacuum conditions, and therefore, the process has a limited throughput. In this work, we utilized laser irradiation as the remote source of energy to make micropatterns in polymer semiconductors because it is suitable for low-cost fabrication with high throughput at an ambient atmospheric pressure.…”
Section: Resultsmentioning
confidence: 99%
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“…To form a micropattern directly onto the polymer devices after completing the entire fabrication process, we employed a heat-induced modification method used for organic materials. Recently, an approach for the local modification of emissive regions in OLEDs was suggested; , however, that process involved a focused electron beam, which requires high vacuum conditions, and therefore, the process has a limited throughput. In this work, we utilized laser irradiation as the remote source of energy to make micropatterns in polymer semiconductors because it is suitable for low-cost fabrication with high throughput at an ambient atmospheric pressure.…”
Section: Resultsmentioning
confidence: 99%
“…The separation in the supply chain can make the manufacturing cost of final products more cost-effective. However, the e-beam process also requires high vacuum ambient, and thus, the potential for a scale-up and low-cost production is rather limited. , …”
Section: Introductionmentioning
confidence: 99%
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“…8). In a first proof of concept green and blue colored diodes could be successfully demonstrated by using this electron beam ablation process [9].…”
Section: Oled Micro-patterningmentioning
confidence: 99%