Abstract:In order to improve our design accuracy and narrow the gap between the design and actual value, we have done some investigations on measuring the effective capacitance of gate lines. We have proposed two method: one is integration method, and another is fitting method. The former is more accurate than the latter. And we find the relationship between effective capacitance and total capacitance of gate line can be described well by one‐dimensional RC‐chain circuit derived from Elmore model. Based on this, we can… Show more
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