2018
DOI: 10.1002/sdtp.12802
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P‐6.11: Sensor Technology ‐ A new chance for low generation TFT production line

Abstract: We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X‐Ray Detector, Glass‐substrate Pressure Sensor, Glass‐substrate Memory, Glass‐substrate Antenna and Glass‐substrate MEMS Devices. The above offers some directions for low generation TFT production line's transition.

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