P-Type ZnSe:N Prepared by Electron Cyclotron Resonance Radical Beam Doping during Molecular Beam Epitaxial Growth

Abstract

ZnSe doped with nitrogen(N) has been prepared by molecular beam epitaxy using N2 *, N* nitrogen radicals, N2 + ions and N atoms from an electron cyclotron resonance nitrogen plasma source. N-doped ZnSe/GaAs heteroepitaxial layers showed p-type conduction with net acceptor concentrations as high as 1.8×1018 cm-3, and the activation rate of N atoms was 60%. Photoluminescence spectra measured at 7 K from p-type ZnSe:N layers with net acceptor concentrations higher than 1018 cm-3 were dominated by two different donor-acceptor pair emission bands with zero phonon energies of 2.684 eV and 2.697 eV.

ZnSe nitrogen doping using an ion-free electron-cyclotron-resonance plasma beam

“…It is easy to identify the voltage V m since it coincides with the maximum differential current ͑dI/dV͒ in the I-V characteristics. 7,8 From this discussion, we can deduce that the removed nitrogen atoms are almost all first-negative transitions of N 2 molecules. 4.…”

“…One of the key techniques, obtaining p-type films with low resistivity was achieved by a nitrogen radical doping technique. [5][6][7][8][9] In this letter, nitrogen doping in ZnSe using a new type of ECR source is studied. The results led to the first blue-green laser room-temperature pulsed operation.…”

True Blue Inorganic Optoelectronic Devices

“…They respectively achieved a net acceptor concentration of 10 17 cm ±3 and 10 15 cm ±3 . The plasma can be generated using a radio frequency, [117] electron cyclotron resonance microwaves, [119] or direct current. [110] Marginal success was obtained by introducing the plasma into low-pressure OMVPE.…”

The effect of nitrogen ions emitted from a plasma source on molecular beam epitaxial growth of p-ZnSe:N

“…[1][2][3][4] So far, the maximum net acceptor concentration (N A ϪN D ) has been limited to around 1ϫ10 18 cm Ϫ3 in ZnSe. 1 One of the most important growth parameters is the chemical species in the nitrogen plasma: excited neutral nitrogen atoms, molecules, and nitrogen ions.…”

“…The nitrogen plasma in a plasma cavity has previously been characterized by optical emission spectroscopy. 3,[5][6][7][8] Several of these reports suggested that nitrogen ions may degrade the crystal quality of p-ZnSe:N and reduce N A ϪN D , however, without any direct evidence. The effective chemical species have not been elucidated yet either.…”