IntroductionRecently, in filament type random access memory (RRAM), variability of switching parameters is one of significant obstacles to commercialization. Thus, various approaches have been proposed to improve the variability of switching parameters. Especially, a lightning-rod effect which is a control of filament dissolution region was proposed as a simple and effective approach [1]. According to previous researches, switching uniformity of various parameters such as read resistance (R read ), set voltage (V set ), and reset current were significantly improved by decreasing reset bias (V reset ). It can be explained by narrower physical gap between an electrode and conducting filament by the decreased V reset . Since the switching non-uniformity comes from the random formation of conducting filament path in the physical gap, we can improve switching uniformity by minimizing the physical gap (lightning-rod effect). However, the resistance ratio (on/off ratio) which determines operation window is degraded due to the reduced physical gap, as shown in Fig. 1. This relation can be defined as a trade-off between the lightning-rod effect (narrower physical gap) and on/off ratio. Therefore, to improve uniformity with reasonable on/off ratio, we need to optimize both the lightning-rod effects and the resistance ratio.Based on the previous papers, inserting additional layer can improve on/off ratio [2]. Thus, we inserted additional layer into typical bi-layer structure RRAM. Moreover, TiO x layer which could lead to non-linear LRS was employed as an interlayer for non-linear resistive switching [3]. The mechanism of triple-layer RRAM was proposed by the difference of oxygen vacancy concentration and chemical potential, as shown in Fig. 2(b) and (c). The layer having high chemical potential can resolve the conducting filament faster than low chemical potential layer [4]. Based on this mechanism, maximized lightning-rod effects can be achieved by resolving the filament at only one layer.The proposed approaches are summarized in Fig. 2(a). To improve switching uniformity without on/off ratio degradation, electrical and structural optimizations such as a limited switching region (lightning-rod effect), bi-layer structure, and insertion of buffer layer were proposed.