P1J-3 Evaluation of 2D Hydrophone Array System Using Epitaxial PZT Thin Film Grown on Epitaxial GAMMA-Al2O3/Si Substrate

Abstract

A piezoelectric ultrasonic hydrophone array was fabricated using epitaxial lead zirconate titanate, Pb(Zr x , Ti 1-x )O 3 (PZT) thin film grown on epitaxial SrRuO 3 /Pt/ -Al 2 O 3 /Si substrates. PZT film with 3 µm in thickness was prepared by solgel method. An experimental ultrasonic hydrophone array measurement system, a one dimensional (1-D) array of 10 elements and a two dimensional (2-D) array of 4 x 4 elements have been developed to evaluate the hydrophone array system performance. In this paper, we describe the fabrication process of the hydrophone arrays and the data acquisition system. The beam direction was estimated and the B-mode image was reconstructed to evaluate the array sensitivity. The potential applications for this hydrophone array are discussed.