IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society 2018
DOI: 10.1109/iecon.2018.8591117
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Packaging with Double-Side Cooling Capability for SiC Devices, Based on Silver Sintering

Abstract: Although they can operate at high temperature, SiC devices require efficient thermal management. One solution is to use a dual-side cooling packaging, where heat can be extracted through two surfaces. Here, such a package is presented, using only materials which can operate at high temperature (>200°C): ceramic substrates, silver sintering, fluorinated parylene. Due to the small feature size of the SiC dies used, a special care is given on the etching resolution of the substrates. The complete manufacturing pr… Show more

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Cited by 6 publications
(5 citation statements)
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“…This directly has an impact on the current capability of the modules. They should be applied with materials suitable for high temperature, such as paralene HT and, silver sintering with silver micro-particles paste [145]. Thermo-mechanical simulations show that doublesided cooling leads to decrease in junction temperature by 15-42% with sintered die attach for double-sided cooling simulations as compared to single sided cooling [146].…”
Section: New Layout Of Power Modulesmentioning
confidence: 99%
“…This directly has an impact on the current capability of the modules. They should be applied with materials suitable for high temperature, such as paralene HT and, silver sintering with silver micro-particles paste [145]. Thermo-mechanical simulations show that doublesided cooling leads to decrease in junction temperature by 15-42% with sintered die attach for double-sided cooling simulations as compared to single sided cooling [146].…”
Section: New Layout Of Power Modulesmentioning
confidence: 99%
“…The first manufacturing step consists in patterning blank DBC mastercards (Rogers-Curamik, 500 µm Cu/250 µm HPS Al 2 O 3 /500 µm Cu). To perform the 2-level copper etching with a sufficient resolution to contact small features such as the gate [9], [10].…”
Section: Manufacturingmentioning
confidence: 99%
“…The principle of the two-step etching technique is presented in Fig. 2, and fully detailed in [10]. Starting with a blank DBC substrate (a), a coat of photosensitive resin (MC Dip coating, Microchemicals) is applied by dip-coating (b).…”
Section: Manufacturingmentioning
confidence: 99%
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“…In recent years, studies have mainly focused on the sintering process. Sintering parameters, such as sintering pressure, sintering temperature profile, the type of organic materials in the paste, the size distribution of the particles, metallization on bonding substrates, and the atmosphere in which the sintering takes place, were considered to reduce the void in the joints and improve bonding force [10][11][12].…”
Section: Introductionmentioning
confidence: 99%