Palladium Ultra Thin Layer Profiles Evaluation by Evanescent Light

Abstract

<p align="justify"> <span style="font-family:Verdana;">Nanometric profiles of sputtered ultra-thin Pd layers with thicknesses in the range 1</span><span> </span><span style="font-family:Verdana;">-</span><span> </span><span style="font-family:Verdana;">10 nm were investigated by cap</span><span style="font-family:Verdana;">turing the leaking evanescent light from optical waveguides. The Pd films were deposited by sputtering on glass sub</span><span style="font-family:Verdana;">stratesalso servingas light waveguides. Calibrating the thickness values for the ultra-thin Pd films obtained from the sputtering rate combined with the DELI estimation technique, gave detailed 1Dand 3D morphological nanometric pro</span><span style="font-family:Verdana;">files of the deposited layers.</span><span></span> </p> <p> <span></span> </p

A Discrete Model of the Evanescent Light Emission from Ultra-Thin Layers

“…Since curve (a) is clearly a better fit for the experimental points, we can assume that the value is the more acceptable result for the evanescent photon extraction parameter γ of the material. In [15] we obtained in a simpler model without absorption being taken into account giving γ = 0.1 nm −1 . We also observe in this paper that γ is larger than the absorption coefficient, which is…”

“…Then this discrete model is utilized to analyse and construct the thickness profiles of sputtered Pd films with ultra-thin thicknesses in the range of 1 -10 nm and the results are compared in Section 3 with the previously used model in Ref. [15].…”