Parallel Linear Actuator System with High Accuracy and Large Stroke

Konishi, Satoshi; Ohno, Kazuyuki; Munechika, Masaki

doi:10.1007/978-3-642-59497-7_162

Cited by 6 publications

(4 citation statements)

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“…A surface micromachined stepping actuator [8] offers 500 µN force, ±100 µm travel and 10 nm step size, but the actuation force of a few tens of mN is required with a larger-actuator-stroke. Inchworm actuators using electrostatic clutching have been reported [2,9,10]. However, to our knowledge, none of the previous MEMS inchworm microactuators has demonstrated zero-power latching capability.…”

Section: Introductionmentioning

confidence: 98%

“…Other requirements for 'shape correction' of mirrors include a stroke of >1 mm and step resolution of <30 nm (λ/20 at λ = 633 nm), with an actuation force of a few tens of mN. Many MEMS-based inchworm actuators have been previously reported [3][4][5][6][7][8][9][10][11][12][13][14][15]; however, none appears to satisfy all the requirements stated above. A MEMS-based electrostatic inchworm motor previously reported [3] moves 400 µm stroke.…”

Section: Introductionmentioning

confidence: 99%

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A normally latched, large-stroke, inchworm microactuator

Toda¹,

Yang

2007

J. Micromech. Microeng.

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This paper presents the successful demonstration of a large-stroke, high-precision inchworm microactuator. The actuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of a PZT-stack actuator unit for slider thrust and electrostatic comb-drive units for slider grip. Incremental step size is precisely adjustable to the tens of nanometers level by controlling the PZT-stack actuator voltage. The observed minimum step size was 59 nm/cycle. Large stroke is obtained by repeating the operation sequence numerous times. A large-stroke actuation exceeding 600 µm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.

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Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

A normally latched, large-stroke, inchworm microactuator

Toda¹,

Yang

2007

J. Micromech. Microeng.

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“…This paper describes electrostatically controlled linear inchworm actuator (hereafter ECLIA) based on micro electro mechanical systems (hereafter MEMS) technology (1) . MEMS based microactuators can provide small displacement in nature.…”

Section: Introductionmentioning

confidence: 99%

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion

et al. 2006

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This paper describes electrostatically controlled linear inchworm actuator (hereafter ECLIA). Besides accuracy, large stroke motion and high throughput become important to improve positioning efficiency. ECLIA can drive its sliders in parallel with high accuracy and large stroke. ECLIA works based on the inchworm motion controlled by the electrostatic clutch mechanism. The electrostatic clutch mechanism can control a transmission of motion from an oscillator to sliders. ECLIA can provide precise motion due to a piezoactuation of the oscillator and large stroke through an electrostatically controlled inchworm motion. ECLIA is developed by MEMS technology in this study. MEMS technology provides multi sliders in batch by taking an advantage of IC fabrication process. The electrostatic clutch method makes it possible to control parallel motions of multi sliders. Fig. 1 shows a schematic drawing of a typical ECLIA. Seven sliders are shown in Fig. 1. Suppose that multi sliders move independently with the aim of accomplishing their desired tracking motions.The system consists of a driving system and a slider system as shown in Fig. 1. The driving system is composed of a piezoactuator and an electrostatic clutch system. The electrostatic clutch system of the driving system has two electrodes: 1) Holding-electrode fixed on the substrate; 2) Movable driving-electrode. Fig. 2 explains motion principle of the system. A case for a forward motion of a slider is represented here. A chart of control signals corresponding to forward, backward, still or stop motion is shown in Fig. 3. The electrostatic clutch motion is synchronized with the piezoactuation through a combination of two electrodes so as to accumulate the piezoactuation step by step. Sliders are insulated each other controlled independently depending on tis electrical potential. Each sliders travels Fig. 1. Schematic drawing of a typical ECLIA forward, backward, and stops by control signals. MEMS technology is used to fabricate ECLIA. DRIE of Si following anodic bonding can provide islanded Si sliders. Parylene C coating on the surface of Si sliders guarantees insulation of adjacent sliders. In the last step, Au film is deposited on the tip of sliders to form mirror surfaces. Fabrication results of isolated sliders are shown in Fig. 3. 16 sliders bonded on a glass substrate are shown in Fig. 3. A slider is 9 mm long and 600 µm wide. 200 nm step was achieved when 50 V was applied to the piezoelectric oscillator. Isolated sliders could move independently as desinged.Optical application of ECLIA is ongoing toward high resolution dynamic gain equalizer as WDM spectral attenuator. Fig. 2. Motion Principle (Cross-section) Fig. 3. Developed ECLIA with 16 sliders -9 -This paper presents electrostatically controlled linear inchworm actuator for precise step and parallel motion. Electrostatically controlled linear inchworm actuator can provide a high accuracy (nm order), a large stroke (mm order) and parallel motion of multi sliders. Micro electro mechanical systems technology ...

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“…Konishi et al (14) proposed a parallel linear actuator system based on the concept of ECLIA (electrostatic controlled linear inchworm actuator) to achieve high positioning accuracy. In spite of these efforts, the position resolution of the inchworm linear motors is still limited, which is typically above 5 nanometers.…”

Section: Introductionmentioning

confidence: 99%

The Design and Characterization of a Piezo-Driven Inchworm Linear Motor with a Reduction-Lever Mechanism

Kwon

Cho

Jang

2004

JSME Int. J., Ser. C

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A piezo-driven inchworm linear motor with a reduction lever mechanism has been designed and characterized. The inchworm motor consists of two clamping devices for gripping a moving shaft and one push-pull device operated by three piezoelectric stacks. To reduce positioning errors caused by control voltage fluctuations and to improve positioning accuracy, a reduction lever mechanism with a monolithic flexure structure is employed to the push-pull device. For the design analysis of the push-pull and clamping devices, their analytical models and equations were developed, by which the static characteristics were evaluated. The positioning performances of the inchworm motor assembled with the push-pull and clamping devices were experimentally characterized. The developed inchworm linear motor proved effective not only in performing a step movement of 1 nm up to 82.5 nm, with the step size optionally adjusted, but also in providing ultra high positioning accuracy.

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Parallel Linear Actuator System with High Accuracy and Large Stroke

Cited by 6 publications

References 1 publication

A normally latched, large-stroke, inchworm microactuator

A normally latched, large-stroke, inchworm microactuator

Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion

The Design and Characterization of a Piezo-Driven Inchworm Linear Motor with a Reduction-Lever Mechanism

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