Parallel near-field optical micro/nanopatterning on curved surfaces by transported micro-particle lens arrays

Khan, Ashfaq; Wang, Zengbo; Sheikh, Mohammad; Whitehead, David; Li, Lin

doi:10.1088/0022-3727/43/30/305302

Cited by 28 publications

(12 citation statements)

References 22 publications

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“…5,16,17 In their studies, the experiments can be generalized into a four-step procedure: (1) close-packed monolayer of silica spherical particles were assembled on a hydrophilic surface first, and (2) then held together by an adhesive and supported by an intermediate medium such as a fused silica glass or a polymer tape (termed CPLA-support for clarity); (3) these spherical particles along with the CPLAsupport were then transported onto the substrate (the free surface of the sphere is now in direct contact with the substrate to be laser machined) and subsequently in step (4) the system was irradiated by a laser in a conventional manner, except that the laser beam passed through the CPLA-support. This concept addresses the limitations of conventional laser microstructuring by means of direct CPLAs.…”

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confidence: 99%

“…Especially when a flexible tape was used as the CPLA-support, the spherical particle array can be applied onto non-flat surface for laser texturing. 16 One the other hand, when using transportable CPLA, the adhesive and CPLA-support have to be chosen with great care. For instance, both the adhesive and the CPLA-support have to be transparent to the laser light.…”

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confidence: 99%

“…CPLA-support melting and re-deposition of the molten CPLA-support on substrates have been observed. 16 In this study, we propose an alternative for transportable CPLA for laser-based micro-/nano-structuring, which will be discussed in Secs. II C and II D. This transportable CPLA is easy to prepare and it does not require any adhesives or an intermediate supporting medium.…”

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confidence: 99%

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Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Sedao

Derrien²,

Römer

et al. 2012

Journal of Applied Physics

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International audienceA micro-sphere array optic was employed for laser surface micro-structuring. This array optic consists of a hexagonally close-packed monolayer of silica micro-spheres. It was organized through a self-assembly process and held together on a glass support, without using any adhesives. The array assembly was then reversed, placed in direct contact with the substrate and exposed to 515 nm, 6.7 ps laser pulses. During the exposure, the silica spheres act as micro-lenses, which enhance the near-field light intensity underneath them. As the spheres are confined in the space between the substrate and glass support, they are not ejected during laser machining. Using this type of direct write laser machining, a large number of identical features (nano-holes) can be produced in parallel simultaneously. The holes drilled are a few hundred nanometres in diameter and the depth depends on the number of laser pulses applied. The impact of laser machining on the micro-spheres was also studied. The micro-spheres were contaminated or partially damaged after micro-structuring. Combination of a moderate laser pulse energy and multiple shots was found to ensure a good surface structuring quality and minimum damage to the spherical particles. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767471

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confidence: 99%

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confidence: 99%

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confidence: 99%

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Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Sedao

Derrien²,

Römer

et al. 2012

Journal of Applied Physics

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“…Furthermore, the microsphere can also be used for samples with complex shapes. [50] After the self-assembly, the microspheres can be transferred to another sample by an adhesive layer. The patterns can be fabricated by a focused laser beam.…”

Section: Other Approachesmentioning

confidence: 99%

Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

Hong

2020

Laser & Photonics Reviews

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Photolithography is one of the most commonly used techniques in semiconductor manufacturing, which is the foundation for all the modern electronic device fabrication. However, deep and extreme ultraviolet lithographic systems as well as the corresponding photomasks are both relatively expensive. The fabrication methods are based on the low‐speed high‐cost electron‐beam lithography or focused‐ion‐beam etching. Therefore, a maskless high‐speed method is highly recommended for the micro/nano‐structure fabrication. Among all these maskless methods, direct laser writing (DLW) is an important and widely adopted micro‐processing technique. Based on the nonlinear exposure, the feature size can achieve down to tens of nanometers. However, the speed of DLW is a technical bottleneck. To overcome this issue, parallel DLW methods are developed, including the self‐assembly microspheres laser patterning, laser interference lithography, and multifocal array DLW. Herein, the principles, advantages, challenges, and applications of these parallel processing technologies are summarized. Nanoscale resolution for large area arbitrary periodic pattern fabrication is achieved. Meanwhile, these technologies have the unique ability to build 3D structures instead of conventional 2D patterns, which is the direction of future micro/nano‐fabrication. These techniques are widely applied to surface processing and functional device fabrication in the field of sensing, solar cells, and metamaterials.

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“…However, some groups have reported performing laser micromachining using a PNJ under the condition that the microspheres are arrayed on the sample surface [13][14][15]. In these studies, the variation in the machining diameter and depth was investigated by fluence control of the incident laser.…”

Section: Introductionmentioning

confidence: 99%