Electron paramagnetic resonance (EPR) was conducted on aluminium oxide films deposited by atomic layer deposition on (100)Si. Multiplet spectra are observed, which can be consistently decomposed assuming the presence of only P b0 and P b1 centres, which are well known in Si/SiO 2 structures. Al 2 O 3 films deposited on HFtreated (100)Si exhibit unpassivated P b0 and P b1 centres, with concentrations of (7.7±1.0)x10 11 cm -2 and (8±3)x10 10 cm -2 respectively. Rapid thermal annealing of the substrate in NH 3 prior to film deposition reduces the unpassivated P b0 concentration to (4.5±0.7)x10 11 cm -2 . Forming gas annealing at temperatures in the range 400 o C to 550 o C causes no further reduction in defect density; this may be related to a spread in passivation activation energy, associated with low temperature deposition.