Improving the lateral resolution is a key focus of the research on
optical measuring systems to expand the fields of application for
optical metrology. By means of microspheres put on an object in a
microscope, and therefore used as a near-field support, it has already
been shown that a superresolution of structures below Abbe’s
diffraction limit is possible. The following investigations give more
detailed theoretical and experimental insight into the physical
mechanisms responsible for the transition of near-field information to
the far field. In particular, the effects of microspheres as
near-field support on the behavior of phase-evaluating interference
microscopes close to the optical resolution limit are studied
experimentally as well as with numerical simulations. Special
attention is drawn to measured data taken with a Linnik microscope of
high numerical aperture. Finally, the measurement results of grating
structures with a period below Abbe’s diffraction limit are
presented.