Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator

Khirallah, Kareem

doi:10.1109/jmems.2012.2221156

Cited by 16 publications

(12 citation statements)

References 26 publications

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“…Electrostatic comb structures have been the key design elements for comb-drive micromechanical resonators [ 304 , 305 , 306 , 307 , 308 , 309 , 310 , 311 , 312 , 313 , 314 , 315 ]. Multiple tuning approaches have been presented to tune the effective spring constant of the resonators, including parallel-plate [ 20 ], fringing field [ 304 ], and variable gap comb-drives [ 305 , 306 ].…”

Section: Active Frequency Tuning Methodsmentioning

confidence: 99%

“…A specific varying-gap comb-finger design for a large-stroke parametric resonator was recently reported in [ 308 ]. A new truss electrode presented by Khirallah [ 309 ] can produce time-varying electrostatic axial force on the resonator and consequently modulate its effective spring constant. Xu and Tsai [ 310 ] presented an interesting method to seek the proper parameter sets to balance the variations of process-induced spring constant and mass.…”

Section: Active Frequency Tuning Methodsmentioning

confidence: 99%

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Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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Section: Active Frequency Tuning Methodsmentioning

confidence: 99%

Section: Active Frequency Tuning Methodsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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“…The resonant mode operation of microelectromechanical systems (MEMS) has found many applications in recent decades due to its advantages, such as a high signal-to-noise ratio, high quality factor, high sensitivity, and high dynamic stability [ 1 , 2 , 3 , 4 , 5 ]. To realize different functions of resonant MEMS, micro-components are designed into various configurations, in which comb drive with folded suspension configuration gradually becomes one of the most popular micro-components in the sensing and actuation field due to its capability in suppressing nonlinearities and increasing actuation force.…”

Section: Introductionmentioning

confidence: 99%

Vibration Identification of Folded-MEMS Comb Drive Resonators

Han

Jin

et al. 2018

Micromachines

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Natural frequency and frequency response are two important indicators for the performances of resonant microelectromechanical systems (MEMS) devices. This paper analytically and numerically investigates the vibration identification of the primary resonance of one type of folded-MEMS comb drive resonator. The governing equation of motion, considering structure and electrostatic nonlinearities, is firstly introduced. To overcome the shortcoming of frequency assumption in the literature, an improved theoretical solution procedure combined with the method of multiple scales and the homotopy concept is applied for primary resonance solutions in which frequency shift due to DC voltage is thoroughly considered. Through theoretical predictions and numerical results via the finite difference method and fourth-order Runge-Kutta simulation, we find that the primary frequency response actually includes low and high-energy branches when AC excitation is small enough. As AC excitation increases to a certain value, both branches intersect with each other. Then, based on the variation properties of frequency response branches, hardening and softening bending, and the ideal estimation of dynamic pull-in instability, a zoning diagram depicting extreme vibration amplitude versus DC voltage is then obtained that separates the dynamic response into five regions. Excellent agreements between the theoretical predictions and simulation results illustrate the effectiveness of the analyses.

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“…Substituting Equation (18) into Equation (14), multiplying by

, and integrating the outcome from x = 0 to 1, we obtain [ 36 , 37 ]:

…”

Section: Perturbation Analysismentioning

confidence: 99%

Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback

Zhang

Wang

et al. 2016

Micromachines

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The parametric excitation system consisting of a flexible beam and shuttle mass widely exists in microelectromechanical systems (MEMS), which can exhibit rich nonlinear dynamic behaviors. This article aims to theoretically investigate the nonlinear jumping phenomena and bifurcation conditions of a class of electrostatically-driven MEMS actuators with a time-delay feedback controller. Considering the comb structure consisting of a flexible beam and shuttle mass, the partial differential governing equation is obtained with both the linear and cubic nonlinear parametric excitation. Then, the method of multiple scales is introduced to obtain a slow flow that is analyzed for stability and bifurcation. Results show that time-delay feedback can improve resonance frequency and stability of the system. What is more, through a detailed mathematical analysis, the discriminant of Hopf bifurcation is theoretically derived, and appropriate time-delay feedback force can make the branch from the Hopf bifurcation point stable under any driving voltage value. Meanwhile, through global bifurcation analysis and saddle node bifurcation analysis, theoretical expressions about the system parameter space and maximum amplitude of monostable vibration are deduced. It is found that the disappearance of the global bifurcation point means the emergence of monostable vibration. Finally, detailed numerical results confirm the analytical prediction.

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Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator

Cited by 16 publications

References 26 publications

Tunable Micro- and Nanomechanical Resonators

Tunable Micro- and Nanomechanical Resonators

Vibration Identification of Folded-MEMS Comb Drive Resonators

Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback

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