Parametric Noise Reduction in a High-Order Nonlinear MEMS Resonator Utilizing Its Bifurcation Points

Sobreviela, Guillermo; Zhao, Chun; Pandit, Milind; Do, Cuong; Du, Sijun; Zou, Xudong; Seshia, Ashwin A.

doi:10.1109/jmems.2017.2736022

Cited by 40 publications

(13 citation statements)

References 24 publications

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“…The first order of l = 1 is considered in this paper. In the case of parametric excitation, the gyroscope’s response can be amplified by a small parametric excitation pump, which appears as a dynamical parameter in the gyroscope’s governing equation [ 11 ].…”

Section: Parametric Excitation In the Push-pull Driven Drgmentioning

confidence: 99%

“…Considering that generally 4 V dc V p > 10,000

in real experiment settings and the component of sin ω d t sin( ω p t + ϕ ) does not work for parametric excitation either [ 11 ], the expression of K ( t ) can be further simplified as:

…”

Section: Parametric Excitation In the Push-pull Driven Drgmentioning

confidence: 99%

“…Moreover, the nonlinearity of the MEMS gyroscopes becomes significant due to the continuous size reduction, which has been deeply investigated in the recent past [ 9 , 10 , 11 , 12 , 13 ]. There are not only negative effects that must be suppressed, but also useful properties that can be exploited in nonlinear MEMS resonators [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

“…There are not only negative effects that must be suppressed, but also useful properties that can be exploited in nonlinear MEMS resonators [ 10 ]. Most of the MEMS resonators are operated in the linear regime to avoid hysteresis and additional noise associated with nonlinearities, in which the double hysteresis behavior is caused by the electrostatic and mechanical nonlinearities [ 11 ]. Besides, electrostatic nonlinear mode coupling is very common in capacitive MEMS resonators [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…Besides, electrostatic nonlinear mode coupling is very common in capacitive MEMS resonators [ 14 ]. Research in a high-order nonlinear MEMS resonator demonstrates that the parametric noise can be suppressed and the frequency stability can be improved when operated at two of its bifurcation points [ 11 ]. The dynamic characteristics and bifurcation analysis were investigated in a 4-DOF micro gyroscope [ 12 ], and the influence of nonlinearity on the phase characteristics was analyzed [ 13 ].…”

Section: Introductionmentioning

confidence: 99%

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Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

et al. 2021

Micromachines

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For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied in a push-pull driven disk resonator gyroscope (DRG) to improve its sensitivity by an electrical pump, causing an arbitrary increase of the “effective Q”. However, due to the differential characteristics of the push-pull driving method, the traditional parametric excitation method is not applicable. As a result, two novel methods are proposed and experimentally carried out to achieve parametric excitation in the push-pull driven DRGs, resulting in a maximum “effective Q” of 2.24 × 106 in the experiment, about a 7.6 times improvement over the intrinsic Q. Besides, subharmonic excitation is also theoretically analyzed and experimentally characterized. The stability boundary of parametric excitation, defined by a threshold voltage, is theoretically predicted and verified by related experiments. It is demonstrated that, when keeping the gyroscope’s vibration at a constant amplitude, the fundamental frequency driving voltage will decrease with the increasing of the parametric voltage and will drop to zero at its threshold value. In this case, the gyroscope operates in a generalized parametric resonance condition, which is called subharmonic excitation. The novel parametric and subharmonic excitation theories displayed in this paper are proven to be efficient and tunable dynamical methods with great potential for adjusting the quality factor flexibly, which can be used to further enhance the resonator’s performance.

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Section: Parametric Excitation In the Push-pull Driven Drgmentioning

confidence: 99%

“…Considering that generally 4 V dc V p > 10,000

in real experiment settings and the component of sin ω d t sin( ω p t + ϕ ) does not work for parametric excitation either [ 11 ], the expression of K ( t ) can be further simplified as:

…”

Section: Parametric Excitation In the Push-pull Driven Drgmentioning

confidence: 99%