Chemical oxygen-iodine lasers (COIL) are attractive for diverse industrial applications because they are capable of high efficiency, high power operation, and because the 1.315 m wavelength can be transmitted through fiber optics and couples efficiently with most metals. Conventional COILs are pumped with O 2 ͑ 1 ⌬͒ that is generated by reaction of Cl 2 in a basic H 2 O 2 solution. Current trends in pumping COILs involve producing the O 2 ͑ 1 ⌬͒ in electric discharges, thereby circumventing the hazards, complexity, and weight associated with pumping and storing caustic liquids. In this work, we have investigated the scaling of O 2 ͑ 1 ⌬͒ yields with specific energy deposition in He/ O 2 mixtures in flowing radio frequency (rf) discharges at pressures of a few to tens of Torr using a global plasma kinetics model. We found that O 2 ͑ 1 ⌬͒ yield increases nearly linearly with specific energy deposition in O 2 molecules up to a few eV per molecule, with yields peaking around 30% by 5 -8 eV. Further increases in specific energy deposition serve only to increase O 2 dissociation and gas heating, thereby reducing the O 2 ͑ 1 ⌬͒ yield. We also found that variations in peak yields at a given specific energy deposition are caused by secondary effects resulting from dilution, pressure, and power level. We show that these secondary effects alter the O 2 ͑ 1 ⌬͒ yield by shifting the O 2 ͑ 1 ⌺͒ /O 2 ͑ 1 ⌬͒ ratio.