Particle and fluid simulations of low-temperature plasma discharges: benchmarks and kinetic effects

Abstract

Fluid, particle-in-cell and hybrid models are the numerical simulation techniques commonly used for simulating low-temperature plasma discharges. Despite the complexity of plasma systems and the challenges in describing and modelling them, well-organized simulation methods can provide physical information often difficult to obtain from experiments. Simulation results can also be used to identify research guidelines, find optimum operating conditions or propose novel designs for performance improvements. In this paper, we present an overview of the principles, strengths and limitations of the three simulation models, including a brief history and the recent status of their development. The three modelling techniques are benchmarked by comparing simulation results in different plasma systems (plasma display panels, capacitively coupled plasmas and inductively coupled plasmas) with experimentally measured data. In addition, different aspects of the electron and ion kinetics in these systems are discussed based upon simulation results.

Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

“…Despite the limitations of fluid models, 13 this simulation approach has been used in other studies of atmospheric-pressure discharges reaching good agreement with selected experimental data. 8,[13][14][15] Figure 1 shows the current-voltage ͑I-V͒ curve of atmospheric-pressure He rf discharges in different gaps. As the discharge gap decreases, the voltage required to ignite and sustain the discharge also decreases.…”

Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

“…1,2 These sources are expected to continue to play the key role in the next generation of plasma reactors. Electronegative gases such as CF 4 , SF 6 , Cl 2 , and O 2 are typically used in etching and deposition processes. 3 The analytical treatment of these discharges is not trivial and computer simulations can provided valuable information for understanding these discharges.…”

“…[4][5][6][7][8][9] These simulation models have been recently advanced from qualitative analysis tools to design tools as their reliability has improved by favorable comparisons of simulation results and experimental data. 4,[10][11][12] In this work one-dimensional particle-in-cell Monte Carlo collision ͑PIC-MCC͒ and two-dimensional fluid models have been used. The fluid model is computationally less intensive than the PIC-MCC approach but it fails to capture nonlocal effects that are important in low pressure capacitive discharges.…”

Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

“…Furthermore, the energy equation for the electrons is solved assuming a Maxwellian electron energy distribution. Although this assumption is not strictly correct, 12 it has been used in many studies of atmospheric-pressure discharges, [16][17][18][19] reaching good agreement with selected experimental data. Finally, the continuity and the energy equations are solved selfconsistently with Poisson's equation.…”