2019
DOI: 10.1049/iet-smt.2018.5371
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Particle swarm approach to the optimisation of trenched cantilever‐based MEMS piezoelectric energy harvesters

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Cited by 19 publications
(5 citation statements)
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References 38 publications
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“…It should be noted that the numerical simulation process used in this paper has been validated in our previous works on MEMS sensors and energy harvesters [32][33][34][35]. We have previously shown that our results for MEMS hydrophones are in a very close agreement with an experimentally fabricated hydrophone [36].…”
Section: Mems Diaphragm Hydrophonesupporting
confidence: 71%
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“…It should be noted that the numerical simulation process used in this paper has been validated in our previous works on MEMS sensors and energy harvesters [32][33][34][35]. We have previously shown that our results for MEMS hydrophones are in a very close agreement with an experimentally fabricated hydrophone [36].…”
Section: Mems Diaphragm Hydrophonesupporting
confidence: 71%
“…This has been proved previously for MEMS cantilever beams. That is when the piezoelectric layer has not covered the cantilever totally and has covered a small part of the beam near the fixed end, and the produced voltage is the largest [34].…”
Section: Input Acoustic Pressurementioning
confidence: 99%
“…PSO is a powerful optimization method. As with fish and bird flocks, the cooperative conduct of insect colonies is inspired by this technique [59]. After all, it is interesting how these animals pass in one direction, often breaking into 2 groups to escape a predator and reforming the initial group [52].…”
Section: Particle Swarm Optimization (Pso)mentioning
confidence: 99%
“…Different types of pressure sensors exist based on various physical properties, such as piezoresistive, piezoelectric, capacitive, magnetic, and electrostatic. Due to their electromechanical coupling and their ability to be micromachined, piezoelectric thin films assist in developing nanoscale and microscale devices [13,14]. The thin films of piezoelectric materials, Barium titanate (BaTiO 3 ), Zinc Oxide (ZnO), and Lead zirconate titanate (PZT), are used in MEMS/NEMS systems as actuators, sensors, surface acoustic wave (SAW) filters, and bulk acoustic wave (BAW) resonators [15,16].…”
Section: Introductionmentioning
confidence: 99%