Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces

Rui, Yue-Feng; Liu, Jingquan; Wang, Yajun; Yang, Chunsheng

doi:10.1007/s00542-011-1279-x

Cited by 41 publications

(20 citation statements)

References 15 publications

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“…photoresist, silicon) to form hemispherical, bump electrodes (Fig. a), pockets for silicon chips, and 3D micro electrode arrays . One work of note utilized a two‐photon polymerization process to create 3D nano/microstructures out of photoresist with high resolution (<100 nm) and coated the structures with Parylene to form precise 3D Parylene structures .…”

Section: Fabrication Techniquesmentioning

confidence: 99%

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Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

166

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Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material.

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Section: Fabrication Techniquesmentioning

confidence: 99%

“…Representative cartoons of examples of Parylene deposition onto different surfaces. (a) Deposition of Parylene onto a hemispherical photoresist structure to form 3D electrodes . (b) Deposition of Parylene onto a liquid substrate to form a porous film on the side in contact with the liquid .…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

166

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“…However, neural tissues are normally three-dimensional (3D) structures, and 2D neural probes are limited to recording signals from only planar brain regions 4,5 . Therefore, 3D microneedle electrodes need to be developed to acquire additional information from the nervous system 6,7 . Typically, the fabrication of 3D microneedle electrodes can be classified into two groups: assembling 2D probe combs into 3D structures and etching bulk materials into 3D devices.…”

Section: Introductionmentioning

confidence: 99%

A flexible three-dimensional electrode mesh: An enabling technology for wireless brain–computer interface prostheses

2016

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The neural interface is a key component in wireless brain-computer prostheses. In this study, we demonstrate that a unique three-dimensional (3D) microneedle electrode on a flexible mesh substrate, which can be fabricated without complicated micromachining techniques, is conformal to the tissues with minimal invasiveness. Furthermore, we demonstrate that it can be applied to different functional layers in the nervous system without length limitation. The microneedle electrode is fabricated using drawing lithography technology from biocompatible materials. In this approach, the profile of a 3D microneedle electrode array is determined by the design of a two-dimensional (2D) pattern on the mask, which can be used to access different functional layers in different locations of the brain. Due to the sufficient stiffness of the electrode and the excellent flexibility of the mesh substrate, the electrode can penetrate into the tissue with its bottom layer fully conformal to the curved brain surface. Then, the exposed contact at the end of the microneedle electrode can successfully acquire neural signals from the brain. INTRODUCTIONBrain-computer prostheses provide a bridge for humans to understand and communicate with the nervous system. Neural interfaces are a key component enabling wireless brain-computer prostheses for long-term implantation. In the last decades, researchers have developed various types of neural interfaces based on advanced functional materials and fabrication technology [1][2][3] . Because a two-dimensional (2D) structure can be shaped precisely and easily, most neural interfaces are fabricated into planar geometries, which are known as neural probes. However, neural tissues are normally three-dimensional (3D) structures, and 2D neural probes are limited to recording signals from only planar brain regions

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“…Sufficient biocompatibility of the applied materials is also necessary. Several types of polymers, such as SU-8 photoresist (Nemani et al), Polyimide (PI) (Seymour et al 2011) andParylene C (Chang et al 2007;Rui et al 2011) meet this criterion. Polymer-based device components for neural interfacing show great heterogeneity in structure and function.…”

Section: Introductionmentioning

confidence: 99%

A polymer-based spiky microelectrode array for electrocorticography

et al. 2014

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The advanced technology of microelectromechanical systems (MEMS) makes possible precise and reproducible construction of various microelectrode arrays (MEAs) with patterns of high spatial density. Polymer-based MEMS devices are gaining increasing attention in the field of electrophysiology, since they can be used to form flexible, yet reliable electrical interfaces with the central and the peripheral nervous system. In this paper we present a novel MEA, designed for obtaining neural signals, with a polyimide (PI) -platinum (Pt) -SU-8 layer structure. Electrodes with special, arrow-like shapes were formed in a single row, enabling slight penetration into the tissue. The applied process flow allowed reproducible batch fabrication of the devices with high yield. In vitro characterization of the electrode arrays was performed with electrochemical impedance spectroscopy (EIS) in lactated Ringer's solution. Functional tests were carried out by performing acute recordings on rat neocortex. The devices have proven to be convenient tools for acute in vivo electrocorticography.

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Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces

Cited by 41 publications

References 15 publications

Micromachining of Parylene C for bioMEMS

Micromachining of Parylene C for bioMEMS

A flexible three-dimensional electrode mesh: An enabling technology for wireless brain–computer interface prostheses

A polymer-based spiky microelectrode array for electrocorticography

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