2017
DOI: 10.3762/bjnano.8.155
|View full text |Cite
|
Sign up to set email alerts
|

Parylene C as a versatile dielectric material for organic field-effect transistors

Abstract: An emerging new technology, organic electronics, is approaching the stage of large-scale industrial application. This is due to a remarkable progress in synthesis of a variety of organic semiconductors, allowing one to design and to fabricate, so far on a laboratory scale, different organic electronic devices of satisfactory performance. However, a complete technology requires upgrading of fabrication procedures of all elements of electronic devices and circuits, which not only comprise active layers, but also… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
48
0

Year Published

2017
2017
2024
2024

Publication Types

Select...
8
1

Relationship

1
8

Authors

Journals

citations
Cited by 56 publications
(48 citation statements)
references
References 68 publications
0
48
0
Order By: Relevance
“…Before the pumping of the vacuum chamber, the parylene-N dimer~5 g was transferred into the ceramic evaporator boat. During the thermal decomposition process, the dimer was sublimated by thermal radiation from the perforated Mo foil heated by a high electric current of 100 A and was pyrolyzed into a monomer [38,39] through the small holes of the foil. The monomer vapor formed a polymer on the surface of the CsI:Na film.…”
Section: Methodsmentioning
confidence: 99%
“…Before the pumping of the vacuum chamber, the parylene-N dimer~5 g was transferred into the ceramic evaporator boat. During the thermal decomposition process, the dimer was sublimated by thermal radiation from the perforated Mo foil heated by a high electric current of 100 A and was pyrolyzed into a monomer [38,39] through the small holes of the foil. The monomer vapor formed a polymer on the surface of the CsI:Na film.…”
Section: Methodsmentioning
confidence: 99%
“…Another common organic material used to fabricate flexible substrates and biocompatible encapsulation is parylene-C [106][107][108]. Such highly versatile material features a high purity that reduces the charge trapping phenomena, hence it allows the fabrication of highly stable structures [109]. An example is reported in Figure 5c, where a 16 platinum electrodes (one of which working as reference electrode) array was fabricated onto 12-µm thick flexible parylene-C substrate [110].…”
Section: Flexible Microelectrodesmentioning
confidence: 99%
“…Unfortunately these approaches can not be used when parylene C (PPXC) is chosen as gate dielectric as the only proven process for producing high-quality PPXC layers is chemical vapor deposition (CVD). Parylene C has emerged as a particularly interesting material for organic electronic devices as a gate dielectric, coating insulator film, or flexible substrate [35] due to its numerous advantageous properties. PPXC films are biocompatible and environmentally friendly [69].…”
Section: Introductionmentioning
confidence: 99%
“…It is inferred that parylene C presents a broad applicability and a versatile role in the technology of OFETs and organic compounds [3]. However, parylene C, as the vast majority of polymers, exhibits a low dielectric constant (3.15 at 1 kHz [34]) thus limiting its performance in specific applications in OFETs and electronic devices.…”
Section: Introductionmentioning
confidence: 99%