“…Conformal Parylene film is a good insulator on 3D electrodes, and it can be easily patterned by O 2 plasma etching. [115,116,[118][119][120] Due to these characteristics, Parylene can be applied as an insulation layer on entire devices, [116,119,121] or as a substrate of free-standing 3D probes. [79,117,122,123] Figure 7b shows an SEM image of a microelectrode coated with Parylene-C. [124] Ghame-Motlagh et al reported that Parylene-C were deposited using a chemical vapor deposition process and etched by oxygen plasma from the tips.…”