Parylene-membrane piezoresistive pressure sensors with XeF&lt;inf&gt;2&lt;/inf&gt;-etched cavity

Giacchino, L.; Tai, Yu‐Chong

doi:10.1109/icsens.2008.4716748

Cited by 6 publications

(4 citation statements)

References 9 publications

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“…Initially used as an encapsulation coating to protect implantable devices [6][7][8], Parylene is now a commonly used structural material in surface micromachining that can be selectively shaped using standard lithographic processes in combination with oxygen plasma-based removal [9]. More recently, the ability to form 3D Parylene structures have also contributed to the development of novel sensors [10,11], microfluidics [12][13][14], and implantable devices [15,16].…”

Section: Introductionmentioning

confidence: 99%

Formation of three-dimensional Parylene C structures via thermoforming

Kim

Chen

Gupta

et al. 2014

J. Micromech. Microeng.

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The thermoplastic nature of Parylene C is leveraged to enable the formation of three-dimensional structures using a thermal forming (thermoforming) technique. Thermoforming involves the heating of Parylene films above its glass transition temperature while they are physically confined in the final desired conformation. Micro and macro scale three-dimensional structures composed of Parylene thin films were developed using the thermoforming process, and the resulting chemical and mechanical changes to the films were characterized. No large changes to the surface and bulk chemistries of the polymer were observed following the thermoforming process conducted in vacuum. Heat treated structures exhibited increased stiffness by a maximum of 37% depending on the treatment temperature, due to an increase in crystallinity of the Parylene polymer. This study revealed important property changes resulting from the process, namely (1) the development of high strains in thermoformed areas of small radii of curvature (30-90 µm) and (2) ∼1.5% bulk material shrinkage in thermoformed multilayered Parylene-Parylene and Parylene-metal-Parylene films. Thermoforming is a simple process whereby three-dimensional structures can be achieved from Parylene C-based thin film structures with tunable mechanical properties as a function of treatment temperature.

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Section: Introductionmentioning

confidence: 99%

Formation of three-dimensional Parylene C structures via thermoforming

Kim

Chen

Gupta

et al. 2014

J. Micromech. Microeng.

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“…Recently, diaphragms for sensors have been formed in-situ by etching-through openings in a Parylene mask with XeF 2 [17]. The work presented here is a variant of that process designed to allow thinner diaphragms for this application.…”

Section: In-situ Diaphragm Formationmentioning

confidence: 99%

Implantable micropump technologies for murine intracochlear infusions

Johnson

Waldron

Frisina

et al. 2010

2010 Annual International Conference of the IEEE Engineering in Medicine and Biology

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Due to the very small size of the mouse inner ear, 600 nL volume, developing effective, controlled infusion systems is quite challenging. Key technologies have been created to minimize both size and power for an implantable pump for murine intracochlear infusions. A method for coupling fine capillary tubing to microfluidic channels is presented which provides low volume, biocompatible interconnects withstanding pressures as high as 827 kPa (120 psi) and consuming less than 20 nL of volume exiting in-plane with the pump. Surface micromachined resistive bridges integrated into the flow channel for anemometry based flow rate measurement have been optimized for low power operation in the ultra-low flow rate regime. A process for creation of deformable diaphragms over pump chambers with simultaneous coating of the microfluidic channels has been developed allowing integration of a biocompatible fluid flow path. These advances represent enabling capabilities for a drug delivery system suitable for space constrained applications such as subcutaneous implantation in mice.

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“…The Young modulus of Parylene is between 2 and 5 GPa, which is lower than those of the human cortical bone (20.5 GPa) and trabecular bone tissue (18 GPa). Therefore, Parylene can be fully attached to the bone [ 19 – 21 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors

Huang

Hsu

et al. 2012

Sensors

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This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

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Parylene-membrane piezoresistive pressure sensors with XeF<inf>2</inf>-etched cavity

Cited by 6 publications

References 9 publications

Formation of three-dimensional Parylene C structures via thermoforming

Formation of three-dimensional Parylene C structures via thermoforming

Implantable micropump technologies for murine intracochlear infusions

Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors

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