Passive MEMS DC Electric Current Sensors

Wang, Dong F.; Liu, Huan; Shang, Xuesong; Xian, Weikang; Hou, Yipeng; Yang, Xu; Itoh, Toshihiro; Maeda, Ryutaro

doi:10.1007/978-981-10-5945-2_14

Cited by 2 publications

(2 citation statements)

References 26 publications

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“…According to their working principles, they can be divided into physical, chemical, and biological. According to the measured values, they can also be divided into acceleration, angular velocity, pressure, displacement, flow, electricity, magnetic field, infrared, temperature, gas composition, humidity, pH, ion concentration, biological concentration, and tactile sensors [86]. A variety of MEMS sensors can be widely used in physics, chemistry, biology etc.…”

Section: Mems Sensing Technologymentioning

confidence: 99%

Application status and development trend of intelligent sensor technology in the electric power industry

Li,

Fan,

Liu

et al. 2024

IET Science Measure & Tech

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With the rapid development of digital technologies such as intelligent control and information communication, digitization has gradually become an inevitable trend to promote technology innovation and industrial upgrading for the power grid. As the basis of digital technology, digital sensing technology will gradually penetrate all aspects of the power system for comprehensive perception and high operational reliability. First, this article introduces the application status and technical requirements of power intelligent sensor technology in various aspects of the power system, including the generation, transmission, transformation, distribution, and consumption of electricity. Next, domestic and foreign scholars' latest research achievements in power sensing technology are described from three major aspects, that is, optical fiber sensing technology, MEMS sensing technology, and sensor self‐powered technology. Finally, future challenges for the electric power intelligent sensors are discussed and an outlook of future widespread application in the clean, safe, and efficient digital power grid is provided.

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Section: Mems Sensing Technologymentioning

confidence: 99%

Application status and development trend of intelligent sensor technology in the electric power industry

Li,

Fan,

Liu

et al. 2024

IET Science Measure & Tech

View full text Add to dashboard Cite

show abstract

“…Therefore, optimizing the structure design and fabrication process of the electrode chip is key to the development of an electrochemical angular accelerometer. Since MEMS offered advantages such as miniaturization [ 2 ], integration, and mass production [ 17 ], a few pioneering studies were conducted to replace traditional platinum mesh electrodes with microfabricated electrodes, where both the sensitivities and working bandwidth of electrochemical angular accelerometers were significantly improved. However, these previously developed angular accelerometers with microfabricated micro-electrodes suffered from electrode structure and inter-electrode wires because of the planar setup of sensitive microelectrodes.…”

Section: Introductionmentioning

confidence: 99%

A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure

Zhang,

Liu,

Zhu

et al. 2024

Micromachines

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This paper presents a MEMS electrochemical angular accelerometer with a silicon-based four-electrode structure, which was made of thousands of interconnected microchannels for electrolyte flow, anodes uniformly coated on structure surfaces and cathodes located on the sidewalls of flow holes. From the perspective of device fabrication, in this study, the previously reported multi-piece assembly was simplified into single-piece integrative manufacturing, effectively addressing the problems of complex assembly and manual alignment. From the perspective of the sensitive structure, in this study, the silicon-based four-electrode structure featuring with complete insulation layers between anodes and cathodes can enable fast electrochemical reactions with improved sensitivities. Numerical simulations were conducted to optimize the geometrical parameters of the silicon-based four-electrode structure, where increases in fluid resistance and cathode area were found to expand working bandwidths and improve device sensitivity, respectively. Then, the silicon-based four-electrode structure was fabricated by conventional MEMS processes, mainly composed of wafer-level bonding and wafer-level etching. As to device characterization, the MEMS electrochemical angular accelerometer with the silicon-based four-electrode structure exhibited a maximum sensitivity of 1458 V/(rad/s2) at 0.01 Hz and a minimum noise level of −164 dB at 1 Hz. Compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this study offered higher sensitivities and lower noise levels, indicating strong potential for applications in the field of rotational seismology.

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Passive MEMS DC Electric Current Sensors

Cited by 2 publications

References 26 publications

Application status and development trend of intelligent sensor technology in the electric power industry

Application status and development trend of intelligent sensor technology in the electric power industry

A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure

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