Passive ring resonator micro-optical gyroscopes

Venediktov, Vladimir Yu.; Filatov, Yu. V.; Shalymov, Egor V.

doi:10.1070/qel15932

Cited by 46 publications

(15 citation statements)

References 30 publications

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“…More recently, emerging applications such as automotive, robotics, biomedical or consumer electronics have increased the demand for small footprints and low-cost gyroscopes [2,5]. Although microelectro-mechanical systems (MEMS) offer a compact alternative for cars and consumer electronics, they require vacuum packaging for high sensitivity [5] and cannot support high vibrations or accelerations [6].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

Kempf

Labeye

Grosse

et al. 2021

ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)

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In this paper, we present a CMOScompatible integrated photonics resonant gyroscope incorporating active Si&Ge components with low-loss SiN waveguiding structures for the first time. The gyroscope design is based on a ring-coupled Mach-Zehnder interferometer (19.2 mm ring length). Based on numerical modelling, the estimated resolution is 1.08 deg/s, representing a 1.56-times improvement over a single ring all-pass design with the same footprint. Further improvement afforded by the MZI-based design is expected under Kerr effet limited conditions. Devices were fabricated with the STMicroelectronics DAPHNE (Datacom Advanced Photonics Nanoscale Environment) 300 mm Photonic R&D platform. Experimental measurements under static (nonrotating) conditions confirm the numerical modelling results.

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Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

Kempf

Labeye

Grosse

et al. 2021

ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)

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“…Optical gyroscopes making use of the Sagnac effect have played important roles in navigation and positioning systems [1]. Compared to micromechanical gyros, optical gyroscopes show high tolerance to acceleration and overload and have short warm-up times, among other factors [2].…”

Section: Introductionmentioning

confidence: 99%

“…By measuring the difference between the resonant frequencies of the CW and CCW beams induced by the Sagnac effect from PD2, we can obtain the output of the gyro. Two parameters are used to characterize the performance of MOGs: the shot-noise-limited theoretical sensitivity and angle random walk (ARW) [1]. Shot-noise is a kind of random noise generated by the photoelectric conversion in photodetectors.…”

Section: Introductionmentioning

confidence: 99%

“…In recent years, many types of WRRs have been fabricated, such as bulk ring resonators [24] and 3D WRRs [25]. Since the current planar optical waveguide process is difficult Two parameters are used to characterize the performance of MOGs: the shot-noise-limited theoretical sensitivity and angle random walk (ARW) [1]. Shot-noise is a kind of random noise generated by the photoelectric conversion in photodetectors.…”

Section: Introductionmentioning

confidence: 99%

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Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes

Feng

Yan

et al. 2020

Photonics

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Micro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOGs using WRRs made from different materials, including silica, indium phosphide, calcium fluoride, and polymer WRRs. The different architectures of the MOGs are reviewed, such as double-ring resonator MOGs and multiple-ring resonator MOGs. Candidate high-Q WRRs for MOGs, including silicon nitride, lithium niobite, calcium fluoride, and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values are compared. Summarizing the advanced WRRs and calculating the shot-noise-limited sensitivity are helpful processes in selecting suitable materials to fabricate MOGs.

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“…However, the MEMS gyroscopes suffer from the unreliability caused by the unstable mechanical structure. Since their sensing elements include moving parts, an acceleration or vibration will be mistakenly detected as the angular speed 8 . Furthermore, the MEMS gyroscopes need special packing and complex readout electronic circuit, which increase the costs.…”

Section: Introductionmentioning

confidence: 99%

Silicon Integrated Interferometric Optical Gyroscope

Xiong

et al. 2018

Sci Rep

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Miniaturized and low-cost optical gyroscopes are urgently required for emerging applications in consumer electronics market. In this paper, we proposed a theoretical analysis and preliminary experiment results for integrated interferometric optical gyroscope based on the silicon-on-insulator (SOI) platform for the first time. The gyroscope is based on the Sagnac effect and composed of coiled multimode waveguides to reduce propagation loss and the footprint. The sensitivity of the sensing part is fully investigated in terms of waveguide loss, gyroscope footprint, crossing numbers for coiled waveguides, as well as the waveguide cross section. The experimental results show that gyroscope sensitivity is 51.3 deg/s with a footprint of 600 μm × 700 μm.

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Passive ring resonator micro-optical gyroscopes

Cited by 46 publications

References 30 publications

Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope

Progress of Waveguide Ring Resonators Used in Micro-Optical Gyroscopes

Silicon Integrated Interferometric Optical Gyroscope

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