2020
DOI: 10.1007/s00339-020-03980-x
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Passive wireless UV SAW sensor

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Cited by 9 publications
(2 citation statements)
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“…In reference [ 24 ], a ZnO layer as thin as 71 nm is used as a UV sensing element: the authors say that this choice is suitable to avoid the perturbation of the wave propagation in the LiNbO 3 substrate from the ZnO mass loading. In reference [ 25 ], the ZnO(250 nm)/128°yx-LiNbO 3 showed a sensitivity of 6000 ppm/(μW/cm 2 ) in a wide UV power range (from 0.010 to 40 mW/cm 2 ): despite the wide UV power range, the double-relaxation phenomenon is not observed, probably due to the small ZnO layer thickness. In reference [ 26 ], however, the UV-induced frequency shifts of the Sezawa wave in ZnO (3.23 µm)/Si-based SAW oscillator were measured in a wide range of UV light intensities: the frequency shift vs. UV power curve exhibits two sensitivities which are 8.12 ppm/(μW/cm 2 ) in the low power region (up to about 50 µW/cm 2 ) and 1.62 ppm/(μW/cm 2 ) in the high power region (from about 50 to 551 µW/cm 2 ); unfortunately, the authors did not study the effect of the UV power on the wave propagation loss.…”
Section: Discussionmentioning
confidence: 99%
“…In reference [ 24 ], a ZnO layer as thin as 71 nm is used as a UV sensing element: the authors say that this choice is suitable to avoid the perturbation of the wave propagation in the LiNbO 3 substrate from the ZnO mass loading. In reference [ 25 ], the ZnO(250 nm)/128°yx-LiNbO 3 showed a sensitivity of 6000 ppm/(μW/cm 2 ) in a wide UV power range (from 0.010 to 40 mW/cm 2 ): despite the wide UV power range, the double-relaxation phenomenon is not observed, probably due to the small ZnO layer thickness. In reference [ 26 ], however, the UV-induced frequency shifts of the Sezawa wave in ZnO (3.23 µm)/Si-based SAW oscillator were measured in a wide range of UV light intensities: the frequency shift vs. UV power curve exhibits two sensitivities which are 8.12 ppm/(μW/cm 2 ) in the low power region (up to about 50 µW/cm 2 ) and 1.62 ppm/(μW/cm 2 ) in the high power region (from about 50 to 551 µW/cm 2 ); unfortunately, the authors did not study the effect of the UV power on the wave propagation loss.…”
Section: Discussionmentioning
confidence: 99%
“…As an emerging sensing element, surface acoustic wave (SAW) sensors have gained considerable attention in the measurement field owing to their passive wireless characteristics [1,2]. These sensors have the advantages of high sensitivity, small size, and good stability [3][4][5], and have been developed for applications in many fields [6][7][8]. In these fields, the SAW sensor is considered to be a torque test solution under conditions of high-speed rotation, heavy oil stains, complex * Author to whom any correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%