2012
DOI: 10.1117/12.920001
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Past, present, and future of backscatter electron (BSE) imaging

Abstract: We describe developments in backscattered electron (BSE) imaging in the scanning electron microscope (SEM) beginning with the pioneering work of Von Ardenne and Knoll in Germany in the 1940's and Charles Oatley, Dennis McMullan, Kenneth Smith and others in the 1950's. Recent work on BSE imaging with very high energy (100's of KeV) electron beams, such as the inspection of voids in metallurgy under thick dielectrics in semiconductor back-endof-the-line (BEOL) structures will be presented. Finally, we will look … Show more

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Cited by 3 publications
(3 citation statements)
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“…Therefore, the tubing repair process could consider a dissimilar-metal weld as well as a pre-heat treatment as an important parameter. The failure of the Ni-Cr-Fe alloy in the petrochemical industry has been studied, and the influence of carburization, carbide formation, thermal treatment conditions and welding repair technology has been investigated by some researchers [1][2][3][13][14][15][16][17][18][19].…”
Section: Weldability With Thermal Heat Treatmentmentioning
confidence: 99%
See 1 more Smart Citation
“…Therefore, the tubing repair process could consider a dissimilar-metal weld as well as a pre-heat treatment as an important parameter. The failure of the Ni-Cr-Fe alloy in the petrochemical industry has been studied, and the influence of carburization, carbide formation, thermal treatment conditions and welding repair technology has been investigated by some researchers [1][2][3][13][14][15][16][17][18][19].…”
Section: Weldability With Thermal Heat Treatmentmentioning
confidence: 99%
“…The more heavy an atom is, the more a BSE signal can be generated, giving results in a brighter contrast. Therefore, the BSE is used to detect contrasts between areas with different elemental compositions [19,20]. Figure 4a,b shows the backscattered electrons images (BEI) of Specimen No.…”
Section: Materials Verificationmentioning
confidence: 99%
“…It is well known that angle-resolved detection of electrons in specific energy ranges can provide useful imaging modalities in the SEM (Niedrig, 1978;Wells, 1979;Reimer, 1998;Rau & Reimer, 2001). With the widespread availability of advanced two-dimensional (2D) imaging detectors in the SEM, an improved experimental characterization of the pertinent effects involved and their correct theoretical description by computational simulations acquires renewed importance (Wells et al, 2012;Jaksch, 2012;Walker et al, 2016;Forbes & Allen, 2016). This is the more so important in the case of crystalline materials, for which the signal generation process can obviously be influenced by diffraction effects due to the local crystal lattice, providing orientation contrast in the SEM (Prior et al, 1996;Day & Quested, 1999;Wright & Nowell, 2006;Day, 2009;Schwarzer & Sukkau, 2013;Wright et al, 2015).…”
Section: Introductionmentioning
confidence: 99%