Patterned Microstructure of Sol-Gel Derived Complex Oxides Using Soft Lithography

Seraji, Seana; Wu, Yun; Jewell-Larson, Nels E.; Forbess, Mike J.; Limmer, Steven J.; Chou, Tammy P.; Cao, Guozhong

doi:10.1002/1521-4095(200010)12:19<1421::aid-adma1421>3.0.co;2-4

Cited by 93 publications

(57 citation statements)

References 10 publications

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“…One possible way to avoid patterning PZT thin films is to use soft lithography [51,52]. Figure 11 illustrates the fabrication process of PZT thin films through use of sol-gel processing and soft lithography [56]. The pattern of the PZT thin films is in the form of parallel stripes.…”

Section: Soft Lithographymentioning

confidence: 99%

PZT Thin-Film Meso- and Micro Devices

Shen

Cao

et al. 2006

Ferroelectrics

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Section: Soft Lithographymentioning

confidence: 99%

PZT Thin-Film Meso- and Micro Devices

Shen

Cao

et al. 2006

Ferroelectrics

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“…The PDMS can be used either as a mold to impart patterns via physical confinement of a fluid precursor that dries to form the final structured thin film or as a stamp to directly transfer the material to the target substrate. The confinementbased techniques include microtransfer molding (TM), [2][3][4] micromolding in capillaries (MIMIC), [5][6][7][8][9][10][11][12][13][14] and embossing, [9][10][11][12][13][14][15][16][17][18] while microcontact printing (CP) [19][20][21][22][23][24][25][26][27][28] is an example of stamping. Schematic drawings of these techniques are provided in Fig.…”

Section: Soft Lithographymentioning

confidence: 99%

Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

Martin

Aksay

2005

J. Mater. Res.

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A new patterning technique for the deposition of sol-gels and chemical solution precursors was developed to address some of the limitations of soft lithography approaches. When using micromolding in capillaries to pattern precursors that exhibit large amounts of shrinkage during drying, topographical distortions develop. In place of patterning the elastomeric mold, the network of capillary channels was patterned directly into the substrate surface and an elastomer membrane is used to complete the channels. When the wetting properties of the substrate surfaces were carefully controlled using self-assembled monolayers (SAMs), lead zirconate titanate thin films with nearly rectangular cross-sections were successfully patterned. This technique, called microchannel molding (CM), also provided a method for aligning multiple layers such as bottom electrodes for device fabrication.

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“…Also, textured Sr 2 Nb 2 O 7 is a promising candidate material for high-temperature piezoelectric sensors in automobiles, thermal power plants, and nuclear power plants because it has a very high Curie temperature of 1342°C [13]. Several improved methods have been reported for the synthesis of Sr 2 Nb 2 O 7 , including hydrothermal method at 240°C for 48 h [12], sol-gel [14], PC molten salt route [13], sol-gel electrophoresis [15], solid state [16] and hydrothermal method at 200°C for 24 h [17]. At room temperature, the Sr 2 Nb 2 O 7 orthorhombic unit cell parameters are a = 3.933, b = 26.726, and c = 5.683 Å.…”

Section: Introductionmentioning

confidence: 99%