2007
DOI: 10.1039/b611630b
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Patterning micron-sized features in a cross-linked poly(acrylic acid) film by a wet etching process

Abstract: This paper describes a photolithographic method to create sub-micron-scale patterns of cationcross-linked poly(acrylic acid) (CCL-PAA). PAA can be cross-linked with a wide range of metal cations-including, but not limited to, Ag + , Ca 2+ , Pd 2+ , Al 3+ , La 3+ , and Ti 4+ . Upon patterning a positive photoresist (diazonaphthoquinone-novolac resin) on a film of CCL-PAA, the exposed regions of CCL-PAA were etched by either an aqueous NaOH or EDTA solution. The initial cross-linking cation could be exchanged fo… Show more

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Cited by 22 publications
(17 citation statements)
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“…Among these, polyvinyl alcohol, polyacrylic acid, chitosan, silk, starch, cellulose derivatives, and algae‐ and yeast‐derived polysaccharides are common options. [ 18–23 ] Due to its excellent film‐forming capabilities, fast dissolution rate, and biodegradable nature, we selected pullulan, a fungal‐derived polysaccharide, for the present carrier‐replica swimmer system (Table 1). [ 24,25 ] Pullulan is commonly found in the food industry as a biodegradable adhesive, binder, and the main ingredient of rapidly dissolving strips for fresh breath.…”
Section: Resultsmentioning
confidence: 99%
“…Among these, polyvinyl alcohol, polyacrylic acid, chitosan, silk, starch, cellulose derivatives, and algae‐ and yeast‐derived polysaccharides are common options. [ 18–23 ] Due to its excellent film‐forming capabilities, fast dissolution rate, and biodegradable nature, we selected pullulan, a fungal‐derived polysaccharide, for the present carrier‐replica swimmer system (Table 1). [ 24,25 ] Pullulan is commonly found in the food industry as a biodegradable adhesive, binder, and the main ingredient of rapidly dissolving strips for fresh breath.…”
Section: Resultsmentioning
confidence: 99%
“…An essential step in advancing the development to fully utilize the superior properties of PAA ionic hydrogels in sensors is rapid prototyping using fast patterning technique to make fine and complicated microstructures. There have been demonstrations of several techniques to pattern PAA ionic hydrogels, including microcontact printing,[2f,4] ion beam lithography,[2e,i,5] micromolding,[2h,6] evaporation‐induced self‐assembly, wet etching, and photomask‐based lithography. [2c,9] However, most of these techniques are time‐consuming or require fastidious processing condition.…”
Section: Methodsmentioning
confidence: 99%
“…Detailed study of influence of different metal cations on crosslinking PAA films is presented in paper [16]. Table 1 lists these cations-and those that failed to cross-link the film-by atomic number.…”
Section: Films Based On Cross-linked Carboxyl-containing Polymersmentioning
confidence: 99%
“…More details regarding such an interaction Table 1. Metal salts that cross-link a film of PAA and that fail to do so a) [16].…”
Section: Films Based On Cross-linked Carboxyl-containing Polymersmentioning
confidence: 99%