Patterning PDMS using a combination of wet and dry etching

Balakrisnan, Bavani; Patil, Santoshkumar N.; Smela, Elisabeth

doi:10.1088/0960-1317/19/4/047002

Cited by 85 publications

(57 citation statements)

References 20 publications

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“…While the exact etching mechanism of PDMS in a CF 4 ∕O 2 plasma has not been determined, the material resembles a combination of silicon dioxide and a carbon-based polymer. 30 The PDMS was mixed in a 10∶1 ratio with its curing agent and then placed in a vacuum desiccator for at least 45 min to remove the bubbles created during mixing. There are at least two possible explanations for the increase in PDMS etch rate that occurs when oxygen is added to the CF 4 plasma.…”

Section: Proposed Approach and Resultsmentioning

confidence: 99%

Design and fabrication of a micromachined free-floating membrane on a flexible substrate

Sundani

Devabhaktuni

Melkonian³

et al. 2013

J. Micro/Nanolith. MEMS MOEMS

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A microelectromechanical system (MEMS) device might function perfectly well in the controlled environment in which it has been created. However, the device can be a real viable product only after it has been fabricated with proven performance in a package. As such, the assembly yield of a MEMS package is often a challenging target to meet. The design and fabrication of a free-floating membrane on a flexible substrate to enable easy and cost-effective packaging of MEMS devices is examined. Since standard MEMS fabrication processes are designed for rigid substrates, several process modifications were required to handle flexible substrates. The adaptation of each fabrication process has been documented. Furthermore, detailed information regarding the selection of compatible materials, as well as incompatibilities that were encountered, has been presented to aid future researchers in developing processes for flexible substrates.

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Section: Proposed Approach and Resultsmentioning

confidence: 99%

Design and fabrication of a micromachined free-floating membrane on a flexible substrate

Sundani

Devabhaktuni

Melkonian³

et al. 2013

J. Micro/Nanolith. MEMS MOEMS

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“…However it has a high potential as material for manufacturing of hundreds of nanometer thick polymer layers for e.g. sensor applications such as ISFETS membranes [26], and as membranes in the field of biomedical engineering [27][28].…”

Section: Solid Layers On Liquid Due To Plasma Induced Surface Polymermentioning

confidence: 99%

Solid on liquid deposition, a review of technological solutions

Homsy

Laux

Jeandupeux

et al. 2015

Microelectronic Engineering

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a b s t r a c tSolid-on-liquid deposition (SOLID) techniques are of great interest to the MEMS and NEMS (Micro-and Nano Electro Mechanical Systems) community because of potential applications in biomedical engineering, on-chip liquid trapping, tunable micro-lenses, and replacements of gate oxides. However, depositing solids on liquid with subsequent hermetic sealing is difficult because liquids tend to have a lower density than solids. Furthermore, current systems seen in nature lack thermal, mechanical or chemical stability. Therefore, it is not surprising that liquids are not ubiquitous as functional layers in MEMS and NEMS. However, SOLID techniques have the potential to be harnessed and controlled for such systems because the gravitational force is negligible compared to surface tension, and therefore, the solid molecular precursors that typically condense on a liquid surface will not sediment into the fluid. In this review we summarize recent research into SOLID, where nucleation and subsequent cross-linking of solid precursors results in thin film growth on a liquid substrate. We describe a large variety of thin film deposition techniques such as thermal evaporation, sputtering, plasma enhanced chemical vapor deposition used to coat liquid substrates. Surprisingly, all attempts at deposition to date have been successful and a stable solid layer on a liquid can always be detected. However, all layers grown by non-equilibrium deposition processes showed a strong presence of wrinkles, presumably due to residual stress. In fact, the only example where no stress was observed is the deposition of parylene layers (poly-para-xylylene, PPX). Using all the experimental data analyzed to date we have been able to propose a simple model that predicts that the surface property of liquids at molecular level is influenced by cohesion forces between the liquid molecules. Finally, we conclude that the condensation of precursors from the gas phase is rather the rule and not the exception for SOLID techniques.

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“…The front side processing is completed by opening the PDMS layer for the contact pads in a CF4:O2 plasma by using an Aluminum hard-etch mask (Fig. 6E) [13]. Processing continues on the backside of the wafer with DRIE etching of the silicon underneath the membrane, stopping on the 1 µm thick oxide etch-stop layer (Fig.…”

Section: Fabricationmentioning

confidence: 99%

A stretchable Micro-Electrode Array for in vitro electrophysiology

Pakazad

Savov

Stolpe

et al. 2011

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems

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A novel stretchable Micro-Electrode Array (MEA) for biomedical applications with robust spiraled interconnects and radial micro-grooves for cell alignment is presented, enabling the unique combination of alignment, mechanical stimulation, and electrical characterization of living cells. Many of the problems normally associated with the fabrication of interconnects and electrodes on stretchable PDMS (Polydimethylsiloxane) membranes have been eliminated by first fabricating the interconnects and then spin-coating the PDMS. Experiments supported by Finite Element simulations demonstrate the robustness of the new spiraled interconnect design. The alignment of cells to micro-molded grooves is demonstrated, allowing for directional stretching of the cells.

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Patterning PDMS using a combination of wet and dry etching

Cited by 85 publications

References 20 publications

Design and fabrication of a micromachined free-floating membrane on a flexible substrate

Design and fabrication of a micromachined free-floating membrane on a flexible substrate

Solid on liquid deposition, a review of technological solutions

A stretchable Micro-Electrode Array for in vitro electrophysiology

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